Expertises
Engineering & Materials Science
# Fabrication
# Nanoelectronics
# Nanofluidics
# Nanowires
# Silicon
Physics & Astronomy
# Fabrication
# Silicon
# Wafers
Publicaties
Recent
van der Wel, B. Y.
, van der Zouw, K.
, Aarnink, A. A. I.
, & Kovalgin, A. Y. (2023).
Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride.
Journal of Physical Chemistry C,
127(34), 17134-17145.
https://doi.org/10.1021/acs.jpcc.3c03063
van der Zouw, K.
, van der Wel, B. Y.
, Aarnink, A. A. I.
, Wolters, R. A. M.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2023).
Low-resistivity molybdenum obtained by atomic layer deposition.
Journal of vacuum science & technology A: vacuum, surfaces, and films,
41(5), Article 052402.
https://doi.org/10.1116/6.0002804
Jonker, D.
, Kooijman, L., Pordeli, Y.
, van der Wel, B.
, Berenschot, E.
, Borgelink, B.
, Le-The, H.
, de Boer, M.
, Eijkel, J.
, Hueting, R.
, Tiggelaar, R.
, van Houselt, A.
, Gardeniers, H.
, & Tas, N. (2020).
Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond.
International Journal of Nanotechnology,
17(7-10), 583-606.
https://doi.org/10.1504/IJNT.2020.111322
Kooijman, L. J., Pordeli, Y.
, van der Wel, B. Y.
, Berenschot, J. W.
, Eijkel, J. C. T.
, & Tas, N. R. (2020).
High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. In
23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019 (pp. 1188-1189). The Chemical and Biological Microsystems Society.
Pordeli, Y.
, Borgelink, B. T. H.
, van der Wel, B. Y.
, Berenschot, E. J. W.
, Dogan, T.
, de Boer, M. J.
, Bruinink, C. M.
, Zandvliet, H. J. W.
, Gardeniers, H. J. G. E.
, & Tas, N. R. (2019).
Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). Article 8808559 IEEE.
https://doi.org/10.1109/TRANSDUCERS.2019.8808559
Verbonden aan Opleidingen
Bachelor
Contactgegevens
Bezoekadres
Universiteit Twente
Drienerlolaan 5
7522 NB Enschede
Postadres
Universiteit Twente
Postbus 217
7500 AE Enschede