Expertises
Engineering & Materials Science
# Actuators
# Fluorocarbons
# Oxygen
# Plasmas
# Reactive Ion Etching
# Silicon
Mathematics
# Fabrication
Chemistry
# Etching
Verbonden aan
Onderzoek
Het maken van piezoMEMS chips voor de projecten 'moving chips' en het ENose.
Publicaties
Recent
Carnevale, L.
, Broccoli, A., Mayorga Gonzalez, R., van Swieten, T. P.
, Groenesteijn, J.
, Ma, K.
, Wiegerink, R. J., Weckhuysen, B. M., Meirer, F.
, Olthuis, W.
, & Odijk, M. (2023).
MEMS-Based Microreactor for In Situ/Operando High-Resolution 3D X-Ray Microscopy of Single Catalyst Particles. Abstract from 28th North American Catalysis Society Meeting, NAM 2023, Providence, Rhode Island, United States.
Uvarov, I. V., Shlepakov, P. S., Melenev, A. E.
, Ma, K.
, Svetovoy, V. B.
, & Krijnen, G. J. M. (2021).
A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing.
Actuators,
10(3), Article 62.
https://doi.org/10.3390/act10030062
Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J.
, Ma, K., Leussink, P.
, de Boer, M., & Jansen, H. (2020).
The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF6/O2 cycles with excellent 3D profile control at room temperature.
ECS journal of solid state science and technology,
9(2), Article 024002.
https://doi.org/10.1149/2162-8777/ab61ed
Lötters, J. C.
, Groenesteijn, J.
, Steenwelle, R. J. A.
, Wiegerink, R. J.
, Alveringh, D.
, Ma, K.
, & Zeng, Y. (2019).
Coriolis flow sensor. (Patent No.
WO2019143239A8).
Pure Link
Contactgegevens
Bezoekadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(gebouwnr. 15)
Hallenweg 21
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
Postbus 217
7500 AE Enschede