Expertises
Material Science
- Actuator
- Temperature
Physics
- Oxygen
- Silicon
- Utilization
Engineering
- Actuators
- Flow Sensor
- Internal Combustion
Organisaties
Het maken van piezoMEMS chips voor de projecten 'moving chips' en het ENose.
Publicaties
2023
MEMS-Based Microreactor for In Situ/Operando High-Resolution 3D X-Ray Microscopy of Single Catalyst Particles (2023)[Contribution to conference › Abstract] 28th North American Catalysis Society Meeting, NAM 2023. Carnevale, L., Broccoli, A., Mayorga Gonzalez, R., van Swieten, T. P., Groenesteijn, J., Ma, K., Wiegerink, R. J., Weckhuysen, B. M., Meirer, F., Olthuis, W. & Odijk, M.
2021
Cr and CrOxetching using SF6and O2plasma (2021)Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 39(3). Article 032201. Nguyen, V. T. H., Jensen, F., Hübner, J., Shkondin, E., Cork, R., Ma, K., Leussink, P. J., De Malsche, W. & Jansen, H.https://doi.org/10.1116/6.0000922A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing (2021)Actuators, 10(3). Article 62. Uvarov, I. V., Shlepakov, P. S., Melenev, A. E., Ma, K., Svetovoy, V. B. & Krijnen, G. J. M.https://doi.org/10.3390/act10030062
2020
The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF6/O2 cycles with excellent 3D profile control at room temperature (2020)ECS journal of solid state science and technology, 9(2). Article 024002. Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J., Ma, K., Leussink, P., de Boer, M. & Jansen, H.https://doi.org/10.1149/2162-8777/ab61ed
Onderzoeksprofielen
Adres
Universiteit Twente
Carré
Postbus 217
7500 AE Enschede
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