Expertises
Engineering & Materials Science
# Actuators
# Fluorocarbons
# Oxygen
# Plasmas
# Reactive Ion Etching
# Silicon
Mathematics
# Fabrication
Chemistry
# Etching
Verbonden aan
Onderzoek
Het maken van piezoMEMS chips voor de projecten 'moving chips' en het ENose.
Publicaties
Recent
Carnevale, L.
, Broccoli, A., Mayorga Gonzalez, R., van Swieten, T. P.
, Groenesteijn, J.
, Ma, K.
, Wiegerink, R. J., Weckhuysen, B. M., Meirer, F.
, Olthuis, W.
, & Odijk, M. (2023).
MEMS-Based Microreactor for In Situ/Operando High-Resolution 3D X-Ray Microscopy of Single Catalyst Particles. Abstract from 28th North American Catalysis Society Meeting, NAM 2023, Providence, Rhode Island, United States.
Uvarov, I. V., Shlepakov, P. S., Melenev, A. E.
, Ma, K.
, Svetovoy, V. B.
, & Krijnen, G. J. M. (2021).
A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing.
Actuators,
10(3), Article 62.
https://doi.org/10.3390/act10030062
Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J.
, Ma, K., Leussink, P.
, de Boer, M., & Jansen, H. (2020).
The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF6/O2 cycles with excellent 3D profile control at room temperature.
ECS journal of solid state science and technology,
9(2), Article 024002.
https://doi.org/10.1149/2162-8777/ab61ed
Lötters, J. C.
, Groenesteijn, J.
, Steenwelle, R. J. A.
, Wiegerink, R. J.
, Alveringh, D.
, Ma, K.
, & Zeng, Y. (2019).
Coriolis flow sensor. (Patent No.
WO2019143239A8).
Löthman, P. A.
, Hageman, T., Hendrix, J., Keizer, H.
, van Wolferen, H.
, Ma, K.
, van de Loosdrecht, M. M.
, ten Haken, B.
, Bolhuis, T.
, & Abelmann, L. (2018).
Response of suspensions of microfabricated magnetic discs to time varying fields. Abstract from 8th International Workshop on Magnetic Particle Imaging, ISMPI 2018, Hamburg, Hamburg, Germany.
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Steenwelle, R. J. A.
, Ma, K.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.
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Contactgegevens
Bezoekadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(gebouwnr. 15)
Hallenweg 21
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
Postbus 217
7500 AE Enschede