Welkom...

dr. M. Berdova (Maria)

Expertises

Lists
Atomic Layer Epitaxy
Atomic Layer Deposition
Histories
Atomic Layer Deposition

Publicaties

Recent
Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., ... Yurkevich, O. (2016). Review article: Recommended reading list of early publications on atomic layer deposition-outcome of the "virtual project on the history of ALD". Journal of vacuum science and technology A: vacuum, surfaces, and films, 35(1), -. [010801]. DOI: 10.1116/1.4971389

Contactgegevens

Bezoekadres

Universiteit Twente
Drienerlolaan 5
7522 NB Enschede

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Postadres

Universiteit Twente
Postbus 217
7500 AE Enschede