Welkom...

dr. M. Berdova (Maria)

Expertises

Atomic Layer Deposition
History

Publicaties

Recent
Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., ... Yurkevich, O. (2016). Review article: Recommended reading list of early publications on atomic layer deposition-outcome of the "virtual project on the history of ALD". Journal of vacuum science and technology A: vacuum, surfaces, and films, 35(1), -. [010801]. DOI: 10.1116/1.4971389

Contactgegevens

Bezoekadres

Universiteit Twente
Drienerlolaan 5
7522 NB Enschede

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Postadres

Universiteit Twente
Postbus 217
7500 AE Enschede