Expertises
Physics & Astronomy
# Actuation
# Mass Flow
# Pressure Sensors
# Sensors
Engineering & Materials Science
# Magnets
# Microfluidics
# Sensors
# Thermal Noise
Publicaties
Recent
Schut, T. V. P. (2021).
Towards a thermal noise limited micro-coriolis mass flow sensor. University of Twente.
https://doi.org/10.3990/1.9789083180410
Schut, T. V. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
μ-Coriolis Mass Flow Sensor With Differential Capacitive Readout.
IEEE sensors journal,
21(5), 5886-5894. [9277606].
https://doi.org/10.1109/JSEN.2020.3042078
Zhao, Y.
, Veltkamp, H. W.
, Schut, T. V. P.
, Sanders, R. G. P., Breazu, B.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2020).
Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology.
Micromachines,
11(6), [561].
https://doi.org/10.3390/MI11060561
Schut, T. V. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2020).
μ-Coriolis mass flow sensor with improved flow sensitivity through modelling of the sensor.
Microelectronic engineering,
226, [111289].
https://doi.org/10.1016/j.mee.2020.111289
de Oliveira, A. C.
, Schut, T. V. P.
, Groenesteijn, J., Fan, Q.
, Wiegerink, R. J., & Makinwa, K. A. A. (2020).
A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface. In
2019 IEEE Sensors: SENSORS 2019 - Conference Proceedings [8956695] (Proceedings of IEEE Sensors; Vol. 2019). IEEE.
https://doi.org/10.1109/SENSORS43011.2019.8956695
Schut, T.
, Wiegerink, R.
, & Lötters, J. (2020).
μ-Coriolis mass flow sensor with resistive readout.
Micromachines,
11(2), [184].
https://doi.org/10.3390/mi11020184
Schut, T. V. P.
, Klein, Y. P.
, Wiegerink, R. J.
, & Lotters, J. C. (2020).
Magnetic field strength improvement for Lorentz actuation of a μ-Coriolis mass flow sensor.
Microelectronic engineering,
224, [111236].
https://doi.org/10.1016/j.mee.2020.111236
Zhao, Y.
, Veltkamp, H-W.
, Schut, T. V. P.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 116-119. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Zhao, Y.
, Veltkamp, H-W.
, Schut, T. V. P.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.
Schut, T. V. P.
, Alveringh, D.
, Sparreboom, W.
, Groenesteijn, J.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Fully integrated mass flow, pressure, density and viscosity sensor for both liquids and gases. In
2018 IEEE Micro Electro Mechanical Systems (pp. 218-221). IEEE.
https://doi.org/10.1109/MEMSYS.2018.8346523
Contactgegevens
Bezoekadres
Universiteit Twente
Drienerlolaan 5
7522 NB Enschede
Postadres
Universiteit Twente
Postbus 217
7500 AE Enschede