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A.A.I. Aarnink (Tom)

Senior Process Engineer

Expertises

Engineering & Materials Science
Atomic Layer Deposition
Spectroscopic Ellipsometry
Tungsten
Wire
Chemistry
Atomic Layer Epitaxy
Tungsten
Physics & Astronomy
Atomic Layer Epitaxy
Tungsten

Publicaties

Recent
van der Zouw, K. , Aarnink, A. A. I. , Schmitz, J. , & Kovalgin, A. Y. (2019). Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films. In 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019 (pp. 48-53). [8730954] IEEE. https://doi.org/10.1109/ICMTS.2019.8730954

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Contactgegevens

Bezoekadres

Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré (gebouwnr. 15), kamer C2615
Hallenweg 23
7522NH  Enschede

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Postadres

Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré  C2615
Postbus 217
7500 AE Enschede

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