Publicaties
2026
Realization of Pure Boron/Si Diodes Through a Two-Step Low-Temperature Growth in a Home-Built LP CVD System (2026)Journal of the Electron Devices Society, 14, 176-185. Vu, T. T. H., Batenburg, K. M., Aarnink, A. A. I., Wu, W., Kovalgin, A. Y., Gravesteijn, D. J. & Hueting, R. J. E.https://doi.org/10.1109/JEDS.2026.3667184
2025
Chemisorption of H radical generated volatile Si hydrides on Ru films (2025)Surfaces and Interfaces, 78. Article 107956. Gaffarov, I., van der Zouw, K., Aarnink, T., Sturm, J. M., Makhotkin, I. A. & Ackermann, M.https://doi.org/10.1016/j.surfin.2025.107956Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Gallium Nitride (2025)ACS Omega, 10(45), 53874-53886. van der Wel, B. Y., van der Zouw, K., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1021/acsomega.5c03453Highly Reactive Atomic Hydrogen as an Alternative Reactant for Atomic Layer Deposition of Platinum Using MeCpPtMe3 (2025)The Journal of physical chemistry C, 129(30), 13822-13829. Van Bui, H., Grillo, F., Nguyen, D. M., Dang, M. D., Aarnink, A. A. I., Wolters, R. A. M., van Ommen, J. R. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.5c03286Metallic molybdenum obtained by atomic layer deposition from Mo(CO)6 (2025)Journal of vacuum science & technology A: vacuum, surfaces, and films, 43(2). Article 022407. van der Zouw, K., van der Wel, B. Y., Sturm, J. M., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y.https://doi.org/10.1116/6.0004244
2024
Electrical behavior of ALD-molybdenum films in the thin-film limit (2024)In 2024 IEEE 36th International Conference on Microelectronic Test Structures, ICMTS 2024 - Proceedings (IEEE International Conference on Microelectronic Test Structures). IEEE. Van Der Zouw, K., Dulfer, S. D., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1109/ICMTS59902.2024.10520676Tuning Nanopores in Tubular Ceramic Nanofiltration Membranes with Atmospheric-Pressure Atomic Layer Deposition: Prospects for Pressure-Based In-Line Monitoring of Pore Narrowing (2024)Separations, 11(1). Article 24. Nijboer, M., Jan, A., Chen, M., Batenburg, K., Peper, J., Aarnink, T., Roozeboom, F., Kovalgin, A., Nijmeijer, A. & Luiten-Olieman, M.https://doi.org/10.3390/separations11010024From hot wire to cold finger:methods to detect the unstable product SnH4 of Sn etching (2024)[Contribution to conference › Poster] E-MRS Spring Meeting 2024. Onnink, A., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A.
2023
Low-resistivity molybdenum obtained by atomic layer deposition (2023)Journal of vacuum science & technology A: vacuum, surfaces, and films, 41(5). Article 052402. van der Zouw, K., van der Wel, B. Y., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y.https://doi.org/10.1116/6.0002804Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride (2023)The Journal of physical chemistry C, 127(34), 17134-17145. van der Wel, B. Y., van der Zouw, K., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.3c03063
Onderzoeksprofielen
Adres
Universiteit Twente
Carré (gebouwnr. 15), kamer C2615
Hallenweg 23
7522 NH Enschede
Universiteit Twente
Carré C2615
Postbus 217
7500 AE Enschede
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