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A.A.I. Aarnink (Tom)

Senior Process Engineer

Expertises

Engineering & Materials Science
Atomic Layer Deposition
Spectroscopic Ellipsometry
Tungsten
Wire
Chemistry
Atomic Layer Epitaxy
Liquid Film
Tungsten
Physics & Astronomy
Atomic Layer Epitaxy

Publicaties

Recent
van der Zouw, K. , Aarnink, A. A. I. , Schmitz, J. , & Kovalgin, A. Y. (2020). Conduction and electric field effect in ultra-thin tungsten films. IEEE Transactions on Semiconductor Manufacturing, 33(2), 202-209. Article 9016070. Advance online publication. https://doi.org/10.1109/TSM.2020.2976886
van der Zouw, K. , Aarnink, A. A. I. , Schmitz, J. , & Kovalgin, A. Y. (2019). Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films. In 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019 (pp. 48-53). Article 8730954 IEEE. https://doi.org/10.1109/ICMTS.2019.8730954

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Contactgegevens

Bezoekadres

Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré (gebouwnr. 15), kamer C2615
Hallenweg 21
7522NH  Enschede

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Postadres

Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré  C2615
Postbus 217
7500 AE Enschede

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