Expertises
Engineering & Materials Science
# Atomic Layer Deposition
# Spectroscopic Ellipsometry
# Tungsten
# Wire
Chemistry
# Atomic Layer Epitaxy
# Liquid Film
# Tungsten
Physics & Astronomy
# Atomic Layer Epitaxy
Verbonden aan
Publicaties
Recent
Thammaiah, S. D.
, Liu, X., Knežević, T.
, Batenburg, K. M.
, Aarnink, A. A. I.
, & Nanver, L. K. (2021).
PureB diode fabrication using physical or chemical vapor deposition methods for increased back-end-of-line accessibility.
Solid-state electronics,
177, [107938].
https://doi.org/10.1016/j.sse.2020.107938
Apaydin, R. O.
, Onnink, A. J.
, Liu, X.
, Aarnink, A. A. I.
, de Jong, M. P.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2020).
Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia.
Journal of vacuum science and technology A: vacuum, surfaces, and films,
38(3), [033411].
https://doi.org/10.1116/6.0000132
Onnink, A. J.
, Apaydin, R. O.
, Aarnink, A. A. I.
, de Jong, M. P.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2020).
Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy.
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics,
38(4), [044009].
https://doi.org/10.1116/6.0000193
van der Zouw, K.
, Aarnink, A. A. I.
, Schmitz, J.
, & Kovalgin, A. Y. (2020).
Conduction and electric field effect in ultra-thin tungsten films.
IEEE Transactions on Semiconductor Manufacturing,
33(2), 202-209. [9016070].
https://doi.org/10.1109/TSM.2020.2976886
Sturm, J. M.
, Liu, F., Darlatt, E., Kolbe, M.
, Aarnink, A. A. I.
, Lee, C. J.
, & Bijkerk, F. (2019).
Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films.
Journal of Micro/ Nanolithography, MEMS, and MOEMS,
18(3), [033501].
https://doi.org/10.1117/1.JMM.18.3.033501
Banerjee, S.
, Aarnink, A. A. I.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2019).
Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride.
The Journal of physical chemistry part C,
123(37), 23214-23225.
https://doi.org/10.1021/acs.jpcc.9b05946
van der Zouw, K.
, Aarnink, A. A. I.
, Schmitz, J.
, & Kovalgin, A. Y. (2019).
Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films. In
2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019 (pp. 48-53). [8730954] IEEE.
https://doi.org/10.1109/ICMTS.2019.8730954
Banerjee, S.
, Onnink, A. J.
, Dutta, S.
, Aarnink, A. A. I.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2018).
Composite GaN-C-Ga ("GaCN") Layers with Tunable Refractive Index.
The Journal of physical chemistry part C,
122(51), 29567-29576.
https://doi.org/10.1021/acs.jpcc.8b09142
Gupta, G.
, Banerjee, S.
, Dutta, S.
, Aarnink, A. A. I.
, Schmitz, J.
, Kovalgin, A. Y.
, & Hueting, R. J. E. (2018).
Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes.
Journal of Applied Physics,
124(8), [084503].
https://doi.org/10.1063/1.5041089
Pure Link
Contactgegevens
Bezoekadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(gebouwnr. 15), kamer C2615
Hallenweg 23
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C2615
Postbus 217
7500 AE Enschede