A. Shafikov (Airat) | Universiteit Twente

Chemistry

# Crystal Defect
# Fracture Strength

Engineering & Materials Science

# Crystal Defects
# Fracture Toughness
# Membranes
# Silicides
# Thin Films

Physics & Astronomy

# Membranes

Faculty of Science and Technology (TNW), XUV Optics (XUV)

Shafikov, A. , van de Kruijs, R. W. E. , Benschop, J. P. H. , Schurink, B. , van den Beld, W. T. E. , Houweling, Z. S. , Kooi, B. J. , Ahmadi, M., de Graaf, S. , & Bijkerk, F. (2022). Relation between composition and fracture strength in off-stoichiometric metal silicide free-standing membranes. Intermetallics, 144, [107531]. https://doi.org/10.1016/j.intermet.2022.107531

Shafikov, A. , van de Kruijs, R. W. E. , Benschop, J. P. H. , van den Beld, W. , Houweling, Z. S. , & Bijkerk, F. (2022). Fracture Toughness of Free-Standing ZrSiₓ Thin Films Measured Using Crack-on-a-Chip Method. Journal of microelectromechanical systems, 31(1), 63-73. https://doi.org/10.1109/JMEMS.2021.3128760

Shafikov, A. , Schurink, B. , van de Kruijs, R. W. E. , Benschop, J. P. H. , van den Beld, W. , Houweling, Z. S. , & Bijkerk, F. (2021). Strengthening ultrathin Si₃N₄membranes by compressive surface stress. Sensors and actuators. A: Physical, 317, [112456]. https://doi.org/10.1016/j.sna.2020.112456

Shafikov, A. , van de Kruijs, R. W. E. , Schurink, B. , Benschop, J. P. H. , & Bijkerk, F. (2020). Mechanical properties of polycrystalline metal silicide thin films. Poster session presented at Physics@Veldhoven 2020, veldhoven, Netherlands.

Shafikov, A. , Bijkerk, F. , Schurink, B. , Sturm, M. , & van de Kruijs, R. W. E. (2020). Pellicle for EUV lithograpy. (Patent No. NL2025186).

Shafikov, A. , Schurink, B. , van de Kruijs, R. W. E. , & Bijkerk, F. (2019). Improving strength of LPCDV Si3N4 freestanding thin films by nanometer thick compressive adlayer. Poster session presented at Nanomechanical testing in materials research and development VII 2019, Malaga, Spain.

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+31649095141 (mobiel)

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a.shafikov@utwente.nl

airat.shafikov@gmail.com

Bezoekadres

Universiteit Twente
Faculty of Science and Technology
Carré (gebouwnr. 15), kamer C2029
Hallenweg 23
7522NH Enschede

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Postadres

Universiteit Twente
Faculty of Science and Technology
Carré C2029
Postbus 217
7500 AE Enschede

Faculty of Science and Technology (TNW), XUV Optics (XUV)

Universiteit Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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