Expertises
Chemistry
# Fracture Strength
Engineering & Materials Science
# Fracture Toughness
# Membranes
# Silicides
# Thin Films
Physics & Astronomy
# Fracture Strength
# Membranes
# Thin Films
Verbonden aan
Publicaties
Recent
Shafikov, A. (2022).
Fracture behavior and characterization of free-standing metal silicide thin films. University of Twente.
https://doi.org/10.3990/1.9789036554251
Shafikov, A.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, Schurink, B.
, van den Beld, W. T. E.
, Houweling, Z. S.
, Kooi, B. J.
, Ahmadi, M., de Graaf, S.
, & Bijkerk, F. (2022).
Relation between composition and fracture strength in off-stoichiometric metal silicide free-standing membranes.
Intermetallics,
144, [107531].
https://doi.org/10.1016/j.intermet.2022.107531
Shafikov, A.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, van den Beld, W.
, Houweling, S.
, & Bijkerk, F. (2022).
Fracture Toughness of Free-Standing ZrSiₓ Thin Films Measured Using Crack-on-a-Chip Method.
Journal of microelectromechanical systems,
31(1), 63-73.
https://doi.org/10.1109/JMEMS.2021.3128760
Shafikov, A.
, Schurink, B.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, van den Beld, W.
, Houweling, S.
, & Bijkerk, F. (2021).
Strengthening ultrathin Si3N4 membranes by compressive surface stress.
Sensors and actuators. A: Physical,
317, [112456].
https://doi.org/10.1016/j.sna.2020.112456
Shafikov, A.
, van de Kruijs, R. W. E.
, Schurink, B.
, Benschop, J. P. H.
, & Bijkerk, F. (2020).
Mechanical properties of polycrystalline metal silicide thin films. Poster session presented at Physics@Veldhoven 2020, veldhoven, Netherlands.
Shafikov, A.
, Bijkerk, F.
, Schurink, B.
, Sturm, M.
, & van de Kruijs, R. W. E. (2020).
Pellicle for EUV lithograpy. (Patent No.
NL2025186).
Shafikov, A.
, Schurink, B.
, van de Kruijs, R. W. E.
, & Bijkerk, F. (2019).
Improving strength of LPCDV Si3N4 freestanding thin films by nanometer thick compressive adlayer. Poster session presented at Nanomechanical testing in materials research and development VII 2019, Malaga, Spain.
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Bezoekadres
Universiteit Twente
Faculty of Science and Technology
Carré
(gebouwnr. 15), kamer C2029
Hallenweg 23
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Science and Technology
Carré
C2029
Postbus 217
7500 AE Enschede