Carré

dr. A.Y. Kovalgin (Alexey)

Universitair hoofddocent
EEMCS-EE-IDS
Carré C2609
a.y.kovalgin@utwente.nl
+31534892841
Visitekaartje

Expertises

  • Material Science

    • Film
    • Tungsten
    • Thin Films
    • Hydrogen
    • Electrical Resistivity
    • Aluminum Nitride
    • Chemical Vapor Deposition
    • Silicon

Organisaties

Publicaties

2026

Hydrogen Radical Permeation Dynamics through Ultrathin ALD Al2O3 Layers Revealed by In Situ Ellipsometry (2026)The Journal of physical chemistry C, 130(23), 8035-8045. Wu, W., van de Kruijs, R. W. E., Gravesteijn, D. J., Houweling, Z. S., Colombi, G. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.6c00522Sensing of Hydrogen Diffusion through Protective Caps: An Ellipsometric Approach to Estimate Hydrogen Content in Pd/Hf Stacks with an Al2O3Cap (2026)The Journal of physical chemistry C, 130(7), 2591-2604. Wu, W., van de Kruijs, R. W. E., Gravesteijn, D. J., Houweling, Z. S., Colombi, G. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.5c06383Molecular layer deposited metalcone hybrid layers for solvent-resistant nanofiltration membranes: surface wetting and permeation (2026)Applied Surface Science Advances, 31. Article 100922. Sondhi, H., Kramberg, T., Nijmeijer, A., Roozeboom, F., Gabrielli, S., Bechelany, M., Kovalgin, A. Y. & Luiten, M.https://doi.org/10.1016/j.apsadv.2025.100922Realization of Pure Boron/Si Diodes Through a Two-Step Low-Temperature Growth in a Home-Built LP CVD System (2026)Journal of the Electron Devices Society, 14, 176-185. Vu, T. T. H., Batenburg, K. M., Aarnink, A. A. I., Wu, W., Kovalgin, A. Y., Gravesteijn, D. J. & Hueting, R. J. E.https://doi.org/10.1109/JEDS.2026.3667184

2025

Creating Nanopores by Calcination of Titanicone Layers Grown by Atmospheric-Pressure Molecular Layer Deposition, for Application in Ceramic Nanofiltration Membranes (2025)Meeting Abstracts of the Electrochemical Society, MA2025-02(31). Sondhi, H., Chen, M., Nijboer, M., Nijmeijer, A., Roozeboom, F., Bechelany, M., Kovalgin, A. & Luiten-Olieman, M.https://doi.org/10.1149/MA2025-02311660mtgabsArea-Selective Low-Pressure Thermal Atomic Layer Deposition of Gallium Nitride (2025)ACS Omega, 10(45), 53874-53886. van der Wel, B. Y., van der Zouw, K., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1021/acsomega.5c03453Pore size tuning of ceramic membranes from ultra- to nanofiltration with Atmospheric Pressure ALD (2025)[Contribution to conference › Poster] 19th Conference of the European Ceramic Society, ECerS 2025. Sondhi, H., Chen, M., Nijboer, M. P., Nijmeijer, A., Roozeboom, F., Kovalgin, A. Y. & Luiten, M.Highly Reactive Atomic Hydrogen as an Alternative Reactant for Atomic Layer Deposition of Platinum Using MeCpPtMe3 (2025)The Journal of physical chemistry C, 129(30), 13822-13829. Van Bui, H., Grillo, F., Nguyen, D. M., Dang, M. D., Aarnink, A. A. I., Wolters, R. A. M., van Ommen, J. R. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.5c03286Monitoring the thickness of white Sn thin island films by spectroscopic ellipsometry (2025)Journal of vacuum science & technology A: vacuum, surfaces, and films, 43(3). Article 033410. Onnink, A. J., Schmitz, J., Terbonssen, B. & Kovalgin, A. Y.https://doi.org/10.1116/6.0004370Film thickness non-uniformity and crucial role of water dosage for atomic layer deposition of yttrium oxide from yttrium cyclopentadienyl precursor (2025)[Contribution to conference › Poster] 24th EUROCVD & ALD 2025. Wu, W., van de Kruijs, R. W. E. & Kovalgin, A. Y.

Onderzoeksprofielen

Vakken collegejaar 2026/2027

Vakken in het huidig collegejaar worden toegevoegd op het moment dat zij definitief zijn in het Osiris systeem. Daarom kan het zijn dat de lijst nog niet compleet is voor het gehele collegejaar.

Vakken collegejaar 2025/2026

Vakken collegejaar 2024/2025

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