Expertises
Material Science
- Temperature
- Tungsten
- Electrical Resistivity
- Thin Films
- Surface
- Aluminum Nitride
Chemistry
- Atomic Layer Epitaxy
- Liquid Film
Organisaties
Publicaties
2024
Electrical behavior of ALD-molybdenum films in the thin-film limitIn 2024 IEEE 36th International Conference on Microelectronic Test Structures, ICMTS 2024 - Proceedings. IEEE. Van Der Zouw, K., Dulfer, S. D., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1109/ICMTS59902.2024.10520676Tuning Nanopores in Tubular Ceramic Nanofiltration Membranes with Atmospheric-Pressure Atomic Layer Deposition: Prospects for Pressure-Based In-Line Monitoring of Pore Narrowing, Article 24. Nijboer, M., Jan, A., Chen, M., Batenburg, K., Peper, J., Aarnink, T., Roozeboom, F., Kovalgin, A., Nijmeijer, A. & Luiten-Olieman, M.https://doi.org/10.3390/separations11010024
2023
Low-resistivity molybdenum obtained by atomic layer deposition, Article 052402. van der Zouw, K., van der Wel, B. Y., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y.https://doi.org/10.1116/6.0002804Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride, 17134-17145. van der Wel, B. Y., van der Zouw, K., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.3c03063Atmospheric-pressure atomic layer deposition: recent applications and new emerging applications in high-porosity/3D materials, 10254-10277. Chen, M., Nijboer, M. P., Kovalgin, A. Y., Nijmeijer, A., Roozeboom, F. & Luiten-Olieman, M. W. J.https://doi.org/10.1039/d3dt01204bThin-film (Al)BCN materials synthesized by sequential precursor pulses to mimic atomic layer deposition, Article 025237. Apaydin, R. O., Aarnink, A. A. I., Gravesteijn, D. J., De Jong, M. P. & Kovalgin, A. Y.https://doi.org/10.1063/6.0002331
2021
Li intercalation into multilayer graphene with controlled defect densities, Article 100045. Ochapski, M. W., Ataç, D., Sanderink, J. G. M., Kovalgin, A. Y. & de Jong, M. P.https://doi.org/10.1016/j.cartre.2021.100045
2020
Large scale structures in chemical vapor deposition-grown graphene on Ni thin films, Article 138225. Ataç, D., Sanderink, J. G. M., Kinge, S., Gravesteijn, D. J., Kovalgin, A. Y. & de Jong, M. P.https://doi.org/10.1016/j.tsf.2020.138225Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy, Article 044009. Onnink, A. J., Apaydin, R. O., Aarnink, A. A. I., de Jong, M. P., Gravesteijn, D. J. & Kovalgin, A. Y.https://doi.org/10.1116/6.0000193Method of forming a device structure using selective deposition of gallium nitride and system for same. Banerjee, S., Aarnink, A. & Kovalgin, A.https://www.freepatentsonline.com/y2020/0194253.html
Onderzoeksprofielen
Vakken collegejaar 2023/2024
Vakken in het huidig collegejaar worden toegevoegd op het moment dat zij definitief zijn in het Osiris systeem. Daarom kan het zijn dat de lijst nog niet compleet is voor het gehele collegejaar.
- 191210730 - Technology
- 191210740 - Materials Science
- 191211208 - Internship EE
- 191211219 - Master Thesis Project
- 191211650 - Multi-Disciplinary Design Project
- 201600017 - Final Project Preparation
- 201600187 - Individual Project
- 201700174 - Internship & Job Orientation Project NT
- 201900200 - Final Project EMSYS
- 201900223 - Capita Selecta Electrical Engineering
- 202000653 - Electro- and Magnetostatics
- 202000654 - Electromagn. Radiation (Project Antenna)
- 202001162 - Bachelor Thesis EE
- 202001434 - Internship EMSYS
- 202100136 - Electrodynamics
- 202100137 - Wireless Transmission Project
- 202200177 - Electro- and MagnetoStatics
- 202200257 - Nano Master Thesis
- 202300070 - Final Project EMSYS
- 202300199 - Fabrication of Nanostructures
Vakken collegejaar 2022/2023
- 191210730 - Technology
- 191210740 - Materials Science
- 191211208 - Internship EE
- 191211219 - Master Thesis Project
- 191211650 - Multi-Disciplinary Design Project
- 201600017 - Final Project Preparation
- 201600042 - Fabrication of Nanostructures
- 201600187 - Individual Project
- 201900200 - Final Project EMSYS
- 201900223 - Capita Selecta Electrical Engineering
- 202000653 - Electro- and Magnetostatics
- 202000654 - Electromagn. Radiation (Project Antenna)
- 202001434 - Internship EMSYS
- 202100136 - Electrodynamics
- 202100137 - Wireless Transmission Project
- 202200177 - Electro- and MagnetoStatics
- 202200342 - Combined Final Project EE/I-Tech
- 202200401 - Combined Final Project I-Tech/BME
Adres
![](/.uc/ia3848a2a0103e7e5110085e4f403ff94cdef11c068080801e3bc0268018041/carre.png)
Universiteit Twente
Carré (gebouwnr. 15), kamer C2609
Hallenweg 23
7522 NH Enschede
Universiteit Twente
Carré C2609
Postbus 217
7500 AE Enschede