Carré

dr. A.Y. Kovalgin (Alexey)

Universitair hoofddocent
EEMCS-EE-IDS
Carré C2609
a.y.kovalgin@utwente.nl
+31534892841
Visitekaartje

Expertises

  • Material Science

    • Temperature
    • Tungsten
    • Electrical Resistivity
    • Aluminum Nitride
    • Film
    • Thin Films

  • Chemistry

    • Atomic Layer Epitaxy
    • Liquid Film

Organisaties

Publicaties

2025

Creating Nanopores by Calcination of Titanicone Layers Grown by Atmospheric-Pressure Molecular Layer Deposition, for Application in Ceramic Nanofiltration Membranes (2025)Meeting Abstracts of the Electrochemical Society, MA2025-02(31). Sondhi, H., Chen, M., Nijboer, M., Nijmeijer, A., Roozeboom, F., Bechelany, M., Kovalgin, A. & Luiten-Olieman, M.https://doi.org/10.1149/MA2025-02311660mtgabsHighly Reactive Atomic Hydrogen as an Alternative Reactant for Atomic Layer Deposition of Platinum Using MeCpPtMe3 (2025)The Journal of physical chemistry C, 129(30), 13822-13829. Van Bui, H., Grillo, F., Nguyen, D. M., Dang, M. D., Aarnink, A. A. I., Wolters, R. A. M., van Ommen, J. R. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.5c03286Monitoring the thickness of white Sn thin island films by spectroscopic ellipsometry (2025)Journal of vacuum science & technology A: vacuum, surfaces, and films, 43(3). Article 033410. Onnink, A. J., Schmitz, J., Terbonssen, B. & Kovalgin, A. Y.https://doi.org/10.1116/6.0004370Film thickness non-uniformity and crucial role of water dosage for atomic layer deposition of yttrium oxide from yttrium cyclopentadienyl precursor (2025)[Contribution to conference › Poster] 24th EUROCVD & ALD 2025. Wu, W., van de Kruijs, R. W. E. & Kovalgin, A. Y.Influence of calcination temperature on the physicochemical properties of atomic/molecular layer deposited hybrid inorganic/organic ceramic nanofiltration membranes (2025)Open Ceramics, 22. Article 100795. Nijboer, M. P., Sondhi, H., Makhoul, E., Bechelany, M., Gabrielli, S., Roozeboom, F., Nijmeijer, A., Kovalgin, A. Y. & Luiten-Olieman, M. W. J.https://doi.org/10.1016/j.oceram.2025.100795Ceramic Nanofiltration Membranes: Creating Nanopores by Calcination of Atmospheric-Pressure Molecular Layer Deposition Grown Titanicone Layers (2025)Membranes, 15(3). Article 86. Sondhi, H., Chen, M., Nijboer, M. P., Nijmeijer, A., Roozeboom, F., Bechelany, M., Kovalgin, A. & Luiten-Olieman, M.https://doi.org/10.3390/membranes15030086Metallic molybdenum obtained by atomic layer deposition from Mo(CO)6 (2025)Journal of vacuum science & technology A: vacuum, surfaces, and films, 43(2). Article 022407. van der Zouw, K., van der Wel, B. Y., Sturm, J. M., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y.https://doi.org/10.1116/6.0004244Increasing hydrophobicity of ceramic membranes by post-deposition nitrogen annealing of molecular layer deposition grown hybrid layers (2025)Applied surface science, 683. Article 161790. Sondhi, H., Nijboer, M., Makhoul, E., Nijmeijer, A., Roozeboom, F., Bechelany, M., Kovalgin, A. & Luiten-Olieman, M.https://doi.org/10.1016/j.apsusc.2024.161790

2024

Electrical behavior of ALD-molybdenum films in the thin-film limit (2024)In 2024 IEEE 36th International Conference on Microelectronic Test Structures, ICMTS 2024 - Proceedings (IEEE International Conference on Microelectronic Test Structures). IEEE. Van Der Zouw, K., Dulfer, S. D., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1109/ICMTS59902.2024.10520676Tuning Nanopores in Tubular Ceramic Nanofiltration Membranes with Atmospheric-Pressure Atomic Layer Deposition: Prospects for Pressure-Based In-Line Monitoring of Pore Narrowing (2024)Separations, 11(1). Article 24. Nijboer, M., Jan, A., Chen, M., Batenburg, K., Peper, J., Aarnink, T., Roozeboom, F., Kovalgin, A., Nijmeijer, A. & Luiten-Olieman, M.https://doi.org/10.3390/separations11010024

Onderzoeksprofielen

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