Carré

dr. A.Y. Kovalgin (Alexey)

Universitair hoofddocent
EEMCS-EE-IDS
Carré C2609
a.y.kovalgin@utwente.nl
+31534892841
Visitekaartje

Expertises

  • Material Science

    • Film
    • Thin Films
    • Tungsten
    • Hydrogen
    • Electrical Resistivity
    • Aluminum Nitride
    • Chemical Vapor Deposition
    • Silicon

Organisaties

Publicaties

2026

Ellipsometric detection of hydrogen permeation through ultrathin Al2O3 and Y2O3 layers (2026)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. Wu, W.https://doi.org/10.3990/1.9789036574396Film Thickness Nonuniformity and the Crucial Role of Water Dosage for Atomic Layer Deposition of Yttrium Oxide (2026)Physica status solidi A, 223(16). Article e70456. Wu, W., van de Kruijs, R. W. E., Gravesteijn, D. J., Houweling, Z. S., Colombi, G. & Kovalgin, A. Y.https://doi.org/10.1002/pssa.70456Hydrogen Radical Permeation Dynamics through Ultrathin ALD Al2O3 Layers Revealed by In Situ Ellipsometry (2026)The Journal of physical chemistry C, 130(23), 8035-8045. Wu, W., van de Kruijs, R. W. E., Gravesteijn, D. J., Houweling, Z. S., Colombi, G. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.6c00522Sensing of Hydrogen Diffusion through Protective Caps: An Ellipsometric Approach to Estimate Hydrogen Content in Pd/Hf Stacks with an Al2O3Cap (2026)The Journal of physical chemistry C, 130(7), 2591-2604. Wu, W., van de Kruijs, R. W. E., Gravesteijn, D. J., Houweling, Z. S., Colombi, G. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.5c06383Improving hydrogen barrier performance of ultrathin Y2O3 by a discontinuous Al2O3 overlayer (2026)[Contribution to conference › Poster] NWO Physics 2026. Wu, W., van de Kruijs, R. W. E. & Kovalgin, A. Y.Molecular layer deposited metalcone hybrid layers for solvent-resistant nanofiltration membranes: surface wetting and permeation (2026)Applied Surface Science Advances, 31. Article 100922. Sondhi, H., Kramberg, T., Nijmeijer, A., Roozeboom, F., Gabrielli, S., Bechelany, M., Kovalgin, A. Y. & Luiten, M.https://doi.org/10.1016/j.apsadv.2025.100922Realization of Pure Boron/Si Diodes Through a Two-Step Low-Temperature Growth in a Home-Built LP CVD System (2026)Journal of the Electron Devices Society, 14, 176-185. Vu, T. T. H., Batenburg, K. M., Aarnink, A. A. I., Wu, W., Kovalgin, A. Y., Gravesteijn, D. J. & Hueting, R. J. E.https://doi.org/10.1109/JEDS.2026.3667184

2025

Creating Nanopores by Calcination of Titanicone Layers Grown by Atmospheric-Pressure Molecular Layer Deposition, for Application in Ceramic Nanofiltration Membranes (2025)Meeting Abstracts of the Electrochemical Society, MA2025-02(31). Sondhi, H., Chen, M., Nijboer, M., Nijmeijer, A., Roozeboom, F., Bechelany, M., Kovalgin, A. & Luiten-Olieman, M.https://doi.org/10.1149/MA2025-02311660mtgabsArea-Selective Low-Pressure Thermal Atomic Layer Deposition of Gallium Nitride (2025)ACS Omega, 10(45), 53874-53886. van der Wel, B. Y., van der Zouw, K., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1021/acsomega.5c03453Pore size tuning of ceramic membranes from ultra- to nanofiltration with Atmospheric Pressure ALD (2025)[Contribution to conference › Poster] 19th Conference of the European Ceramic Society, ECerS 2025. Sondhi, H., Chen, M., Nijboer, M. P., Nijmeijer, A., Roozeboom, F., Kovalgin, A. Y. & Luiten, M.

Onderzoeksprofielen

QR codeScan de QR-code of
Download vCard