Welkom...

dr. A.Y. Kovalgin (Alexey)

Universitair hoofddocent

Expertises

Engineering & Materials Science
Atomic Layer Deposition
Spectroscopic Ellipsometry
Tungsten
Wire
Chemistry
Atomic Layer Epitaxy
Liquid Film
Tungsten
Physics & Astronomy
Atomic Layer Epitaxy

Publicaties

Recent
Banerjee, S. (2019). From radical-enhanced to pure thermal ALD of gallium and aluminium nitrides. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036548250

Pure Link

Contactgegevens

Bezoekadres

Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré (gebouwnr. 15), kamer C2609
Hallenweg 23
7522NH  Enschede

Navigeer naar locatie

Postadres

Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré  C2609
Postbus 217
7500 AE Enschede