Expertises
Engineering & Materials Science
# Atomic Layer Deposition
# Spectroscopic Ellipsometry
# Tungsten
# Wire
Chemistry
# Atomic Layer Epitaxy
# Liquid Film
# Tungsten
Physics & Astronomy
# Atomic Layer Epitaxy
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Publicaties
Recent
Nijboer, M., Jan, A., Chen, M.
, Batenburg, K., Peper, J., Aarnink, T., Roozeboom, F.
, Kovalgin, A.
, Nijmeijer, A.
, & Luiten-Olieman, M. (2024).
Tuning Nanopores in Tubular Ceramic Nanofiltration Membranes with Atmospheric-Pressure Atomic Layer Deposition: Prospects for Pressure-Based In-Line Monitoring of Pore Narrowing.
Separations,
11(1), Article 24.
https://doi.org/10.3390/separations11010024
van der Wel, B. Y.
, van der Zouw, K.
, Aarnink, A. A. I.
, & Kovalgin, A. Y. (2023).
Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride.
Journal of Physical Chemistry C,
127(34), 17134-17145.
https://doi.org/10.1021/acs.jpcc.3c03063
Chen, M.
, Nijboer, M. P.
, Kovalgin, A. Y.
, Nijmeijer, A., Roozeboom, F.
, & Luiten-Olieman, M. W. J. (2023).
Atmospheric-pressure atomic layer deposition: recent applications and new emerging applications in high-porosity/3D materials.
Dalton transactions,
52(30), 10254-10277.
https://doi.org/10.1039/d3dt01204b
van der Zouw, K.
, van der Wel, B. Y.
, Aarnink, A. A. I.
, Wolters, R. A. M.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2023).
Low-resistivity molybdenum obtained by atomic layer deposition.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films,
41(5), Article 052402.
https://doi.org/10.1116/6.0002804
Apaydin, R. O.
, Onnink, A. J.
, Liu, X.
, Aarnink, A. A. I.
, de Jong, M. P.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2020).
Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia.
Journal of vacuum science and technology A: vacuum, surfaces, and films,
38(3), Article 033411.
https://doi.org/10.1116/6.0000132
Ataç, D.
, Sanderink, J. G. M., Kinge, S.
, Gravesteijn, D. J.
, Kovalgin, A. Y.
, & de Jong, M. P. (2020).
Large scale structures in chemical vapor deposition-grown graphene on Ni thin films.
Thin solid films,
709, Article 138225.
https://doi.org/10.1016/j.tsf.2020.138225
Onnink, A. J.
, Apaydin, R. O.
, Aarnink, A. A. I.
, de Jong, M. P.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2020).
Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy.
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics,
38(4), Article 044009.
https://doi.org/10.1116/6.0000193
Apaydin, R. O. (2020).
Thermal and radical enhanced atomic layer deposition of films containing boron, nitrogen and carbon. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036549806
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Vakken Collegejaar 2023/2024
Vakken in het huidig collegejaar worden toegevoegd op het moment dat zij definitief zijn in het Osiris systeem. Daarom kan het zijn dat de lijst nog niet compleet is voor het gehele collegejaar.
Vakken Collegejaar 2022/2023
Contactgegevens
Bezoekadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(gebouwnr. 15), kamer C2609
Hallenweg 21
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C2609
Postbus 217
7500 AE Enschede