dr. A.Y. Kovalgin (Alexey)

Engineering & Materials Science

# Atomic Layer Deposition
# Spectroscopic Ellipsometry
# Tungsten
# Wire

Chemistry

# Atomic Layer Epitaxy
# Liquid Film
# Tungsten

Physics & Astronomy

# Atomic Layer Epitaxy

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Integrated Devices and Systems (IDS)

van der Zouw, K. , van der Wel, B. Y. , Aarnink, A. A. I. , Wolters, R. A. M. , Gravesteijn, D. J. , & Kovalgin, A. Y. (2023). Low-resistivity molybdenum obtained by atomic layer deposition. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 41(5), Article 052402. https://doi.org/10.1116/6.0002804

Apaydin, R. O. , Aarnink, A. A. I. , Gravesteijn, D. J. , De Jong, M. P. , & Kovalgin, A. Y. (2023). Thin-film (Al)BCN materials synthesized by sequential precursor pulses to mimic atomic layer deposition. AIP advances, 13(2), Article 025237. https://doi.org/10.1063/6.0002331

Ochapski, M. W. , Ataç, D. , Sanderink, J. G. M. , Kovalgin, A. Y. , & de Jong, M. P. (2021). Li intercalation into multilayer graphene with controlled defect densities. Carbon trends, 4, Article 100045. Advance online publication. https://doi.org/10.1016/j.cartre.2021.100045

Apaydin, R. O. , Onnink, A. J. , Liu, X. , Aarnink, A. A. I. , de Jong, M. P. , Gravesteijn, D. J. , & Kovalgin, A. Y. (2020). Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia. Journal of vacuum science and technology A: vacuum, surfaces, and films, 38(3), Article 033411. https://doi.org/10.1116/6.0000132

Ataç, D. , Sanderink, J. G. M., Kinge, S. , Gravesteijn, D. J. , Kovalgin, A. Y. , & de Jong, M. P. (2020). Large scale structures in chemical vapor deposition-grown graphene on Ni thin films. Thin solid films, 709, Article 138225. https://doi.org/10.1016/j.tsf.2020.138225

Onnink, A. J. , Apaydin, R. O. , Aarnink, A. A. I. , de Jong, M. P. , Gravesteijn, D. J. , & Kovalgin, A. Y. (2020). Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 38(4), Article 044009. https://doi.org/10.1116/6.0000193

Apaydin, R. O. (2020). Thermal and radical enhanced atomic layer deposition of films containing boron, nitrogen and carbon. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036549806

van der Zouw, K. , Aarnink, A. A. I. , Schmitz, J. , & Kovalgin, A. Y. (2020). Conduction and electric field effect in ultra-thin tungsten films. IEEE Transactions on Semiconductor Manufacturing, 33(2), 202-209. Article 9016070. Advance online publication. https://doi.org/10.1109/TSM.2020.2976886

Banerjee, S. , Aarnink, A. , & Kovalgin, A. (2020). Method of forming a device structure using selective deposition of gallium nitride and system for same. (Patent No. 62/779684). https://www.freepatentsonline.com/y2020/0194253.html

Onnink, A. J. , Apaydin, R. O. , Schmitz, J. , & Kovalgin, A. Y. (2019). In-situ study of ammonium bromide formation for optimizing boron nitride ALD from BBr3 and NH3. Abstract from EuroCVD 22 Baltic ALD 16 |2019, Luxembourg, Luxembourg.

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+31534892841

+31534897539 (bij geen gehoor)

a.y.kovalgin@utwente.nl

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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré (gebouwnr. 15), kamer C2609
Hallenweg 21
7522NH Enschede

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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré C2609
Postbus 217
7500 AE Enschede

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Integrated Devices and Systems (IDS)

Universiteit Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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