Expertises
Engineering & Materials Science
# Atomic Layer Deposition
# Spectroscopic Ellipsometry
# Tungsten
# Wire
Chemistry
# Atomic Layer Epitaxy
# Liquid Film
# Tungsten
Physics & Astronomy
# Atomic Layer Epitaxy
Verbonden aan
Publicaties
Recent
van der Zouw, K.
, van der Wel, B. Y.
, Aarnink, A. A. I.
, Wolters, R. A. M.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2023).
Low-resistivity molybdenum obtained by atomic layer deposition.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films,
41(5), Article 052402.
https://doi.org/10.1116/6.0002804
Ochapski, M. W.
, Ataç, D.
, Sanderink, J. G. M.
, Kovalgin, A. Y.
, & de Jong, M. P. (2021).
Li intercalation into multilayer graphene with controlled defect densities.
Carbon trends,
4, Article 100045. Advance online publication.
https://doi.org/10.1016/j.cartre.2021.100045
Apaydin, R. O.
, Onnink, A. J.
, Liu, X.
, Aarnink, A. A. I.
, de Jong, M. P.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2020).
Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia.
Journal of vacuum science and technology A: vacuum, surfaces, and films,
38(3), Article 033411.
https://doi.org/10.1116/6.0000132
Ataç, D.
, Sanderink, J. G. M., Kinge, S.
, Gravesteijn, D. J.
, Kovalgin, A. Y.
, & de Jong, M. P. (2020).
Large scale structures in chemical vapor deposition-grown graphene on Ni thin films.
Thin solid films,
709, Article 138225.
https://doi.org/10.1016/j.tsf.2020.138225
Onnink, A. J.
, Apaydin, R. O.
, Aarnink, A. A. I.
, de Jong, M. P.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2020).
Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy.
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics,
38(4), Article 044009.
https://doi.org/10.1116/6.0000193
Apaydin, R. O. (2020).
Thermal and radical enhanced atomic layer deposition of films containing boron, nitrogen and carbon. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036549806
van der Zouw, K.
, Aarnink, A. A. I.
, Schmitz, J.
, & Kovalgin, A. Y. (2020).
Conduction and electric field effect in ultra-thin tungsten films.
IEEE Transactions on Semiconductor Manufacturing,
33(2), 202-209. Article 9016070. Advance online publication.
https://doi.org/10.1109/TSM.2020.2976886
Onnink, A. J.
, Apaydin, R. O.
, Schmitz, J.
, & Kovalgin, A. Y. (2019).
In-situ study of ammonium bromide formation for optimizing boron nitride ALD from BBr3 and NH3. Abstract from EuroCVD 22 Baltic ALD 16 |2019, Luxembourg, Luxembourg.
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Vakken Collegejaar 2023/2024
Vakken in het huidig collegejaar worden toegevoegd op het moment dat zij definitief zijn in het Osiris systeem. Daarom kan het zijn dat de lijst nog niet compleet is voor het gehele collegejaar.
Vakken Collegejaar 2022/2023
Contactgegevens
Bezoekadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(gebouwnr. 15), kamer C2609
Hallenweg 21
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C2609
Postbus 217
7500 AE Enschede