Welkom...

dr. A.Y. Kovalgin (Alexey)

Universitair hoofddocent

Expertises

Engineering & Materials Science
Atomic Layer Deposition
Spectroscopic Ellipsometry
Tungsten
Wire
Chemistry
Atomic Layer Epitaxy
Liquid Film
Tungsten
Physics & Astronomy
Atomic Layer Epitaxy

Publicaties

Recent
van der Zouw, K. , Aarnink, A. A. I. , Schmitz, J. , & Kovalgin, A. Y. (2020). Conduction and electric field effect in ultra-thin tungsten films. IEEE Transactions on Semiconductor Manufacturing, 33(2), 202-209. Article 9016070. Advance online publication. https://doi.org/10.1109/TSM.2020.2976886

Pure Link

Contactgegevens

Bezoekadres

Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré (gebouwnr. 15), kamer C2609
Hallenweg 21
7522NH  Enschede

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Postadres

Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré  C2609
Postbus 217
7500 AE Enschede