Welkom...

dr.ir. C. Salm (Cora)

Docent

Expertises

Detectors
Oxides
Electromigration
Temperature
Silicon
Metals
Plasmas
Imaging Techniques

Publicaties

Recent
Wang, J., Bielen, J., Salm, C., & Schmitz, J. (2016). Spring-constant measurement methods for RF-MEMS capacitive switches. In 2016 International Conference on Microelectronic Test Structures (ICMTS) (pp. 10-14). USA: IEEE. DOI: 10.1109/ICMTS.2016.7476164
van der Graaf, H., Aarnink, A. A. I., Aarts, A., van Bakel, N., Berbee, E., Berkien, A., ... Wyrsch, N. (2013). The gridpix detector: History and perspective. Modern physics letters. A, 28(28-13), 13400211-13400217. DOI: 10.1142/S021773231340021X
Kazmi, S. N. R., Salm, C., & Schmitz, J. (2013). Cryogenic reactive ion etching of in-situ highly boron doped LPCVD poly Si0.3Ge0.7 using SF6 and O2 plasma. In 38th International Conference on Micro and Nano Engineering (pp. 311-314). (Microelectronic Engineering; Vol. 110). Amsterdam: ELSEVIER. DOI: 10.1016/j.mee.2013.02.034
Wang, J., Salm, C., & Schmitz, J. (2013). Comparison of C-V measurement methods for RF-MEMS capacitive switches. In IEEE International Conference on Microelectronic Test Structures, ICMTS 2013 (pp. 53-58). USA: IEEE Electron Devices Society. DOI: 10.1109/ICMTS.2013.6528145

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Contactgegevens

Bezoekadres

Universiteit Twente
Faculteit Elektrotechniek, Wiskunde en Informatica
Carré (gebouwnr. 15), kamer 2611
Hallenweg 23
7522NH  Enschede

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Postadres

Universiteit Twente
Faculteit Elektrotechniek, Wiskunde en Informatica
Carré  2611
Postbus 217
7500 AE Enschede

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