Publicaties
2023
Active Wafer Table Based on Piezoelectric Thin Films (2023)[Contribution to conference › Poster] NWO Physics 2023. Şimşek, E., Vries, S. E., Jansen, B., Steur, M., Bijkerk, F., Bayraktar, M. & Ackermann, M.Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables (2023)[Contribution to conference › Poster] MESA+ Meeting 2023. Şimşek, E., Jansen, B., Bayraktar, M. & Ackermann, M.
Onderzoeksprofielen
Adres
Universiteit Twente
Carré (gebouwnr. 15), kamer C3209
Hallenweg 23
7522 NH Enschede
Universiteit Twente
Carré C3209
Postbus 217
7500 AE Enschede
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