Publicaties
Recent
Şimşek, E., Jansen, B.
, Bayraktar, M.
, & Ackermann, M. (2023).
Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables. Poster session presented at MESA+ Meeting 2023, Enschede, Netherlands.
Şimşek, E., Vries, S. E., Jansen, B., Steur, M.
, Bijkerk, F.
, Bayraktar, M.
, & Ackermann, M. (2023).
Active Wafer Table Based on Piezoelectric Thin Films. Poster session presented at NWO Physics 2023, Veldhoven, Netherlands.
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Contactgegevens
Bezoekadres
Universiteit Twente
Faculty of Science and Technology
Carré
(gebouwnr. 15), kamer C3209
Hallenweg 21
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Science and Technology
Carré
C3209
Postbus 217
7500 AE Enschede