Publicaties
2026
Active substrate support using piezoelectric thin films (2026)Proceedings of SPIE - the international society for optical engineering, 13981. Şimşek, E., Jansen, B., Ackermann, M. & Bayraktar, M.https://doi.org/10.1117/12.3087271
2025
Templated Pb(Zr,Ti)O3 growth using seed layers (2025)[Contribution to conference › Poster] International Workshop on 11th Piezoelectric MEMS, PiezoMEMS 2025. Repecaud, P.-A. F., Şimşek, E. & Bayraktar, M.Towards First Ever Active Wafer Support Based on Piezoelectric Thin Films (2025)[Contribution to conference › Poster] ASML Technology Conference 2025. Şimşek, E., Jansen, B., Ackermann, M. & Bayraktar, M.
2023
Active Wafer Table Based on Piezoelectric Thin Films (2023)[Contribution to conference › Poster] NWO Physics 2023. Şimşek, E., Vries, S. E., Jansen, B., Steur, M., Bijkerk, F., Bayraktar, M. & Ackermann, M.Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables (2023)[Contribution to conference › Poster] MESA+ Meeting 2023. Şimşek, E., Jansen, B., Bayraktar, M. & Ackermann, M.
Onderzoeksprofielen
Adres
Universiteit Twente
Carré (gebouwnr. 15), kamer C3209
Hallenweg 23
7522 NH Enschede
Universiteit Twente
Carré C3209
Postbus 217
7500 AE Enschede
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