Expertises
Physics & Astronomy
# Lithography
# Mirrors
# Optics
# Reflectance
# Thin Films
# Wavelengths
Engineering & Materials Science
# Multilayers
Chemistry
# Multilayer
Verbonden aan
Publicaties
Recent
Şimşek, E., Vries, S. E., Jansen, B., Steur, M.
, Bijkerk, F.
, Bayraktar, M.
, & Ackermann, M. (2023).
Active Wafer Table Based on Piezoelectric Thin Films. Poster session presented at NWO Physics 2023, Veldhoven, Netherlands.
Chen, J.
, Louis, E., Harmsen, R.
, Tsarfati, T.
, Wormeester, H., van Kampen, M., van Schaik, W.
, van de Kruijs, R.
, & Bijkerk, F. (2023).
Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12].
Applied surface science,
618, Article 155765.
https://doi.org/10.1016/j.apsusc.2022.155765
Bayraktar, M., Liu, F., Versolato, O.
, & Bijkerk, F. (2023).
EUV Source Metrology. In V. Bakshi (Ed.),
Photon Sources for Lithography and Metrology (pp. 509-535)
https://doi.org/10.1117/3.2638242.ch13
Lucke, P.
, Nematollahi, M.
, Bayraktar, M.
, Yakshin, A. E.
, Elshof, J. E. T.
, & Bijkerk, F. (2022).
Influence of the Template Layer on the Structure and Ferroelectric Properties of PbZr<sub>0.52</sub>Ti<sub>0.48</sub>O<sub>3</sub> Films.
ACS Omega,
7(26), 22210-22220.
https://doi.org/10.1021/acsomega.2c00815
Chandrasekaran, A. (2022).
Surface and interface diffusion processes in nanoscale thin films. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036554763
Shafikov, A. (2022).
Fracture behavior and characterization of free-standing metal silicide thin films. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036554251
Phadke, P.
, Zameshin, A. A.
, Sturm, J. M.
, van de Kruijs, R. W. E.
, & Bijkerk, F. (2022).
Sputter yields of monoatomic solids by Ar and Ne ions near the threshold: A Bayesian analysis of the Yamamura Model.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms,
520, 29-39.
https://doi.org/10.1016/j.nimb.2022.03.016
Shafikov, A.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, Schurink, B.
, van den Beld, W. T. E.
, Houweling, Z. S.
, Kooi, B. J.
, Ahmadi, M., de Graaf, S.
, & Bijkerk, F. (2022).
Relation between composition and fracture strength in off-stoichiometric metal silicide free-standing membranes.
Intermetallics,
144, Article 107531.
https://doi.org/10.1016/j.intermet.2022.107531
Kizir, S. (2022).
Nucleation, growth and hydrogen resistance of multi-layer graphene. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036552820
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Universiteit Twente
Faculty of Science and Technology
Carré
(gebouwnr. 15), kamer C2025
Hallenweg 21
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Science and Technology
Carré
C2025
Postbus 217
7500 AE Enschede