Expertises
Physics & Astronomy
# Lithography
# Mirrors
# Optics
# Reflectance
# Thin Films
# Wavelengths
Engineering & Materials Science
# Multilayers
Chemistry
# Multilayer
Verbonden aan
Publicaties
Recent
Chen, J.
, Louis, E., Harmsen, R.
, Tsarfati, T.
, Wormeester, H., van Kampen, M., van Schaik, W.
, van de Kruijs, R.
, & Bijkerk, F. (2023).
Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12].
Applied surface science,
618, Article 155765. Advance online publication.
https://doi.org/10.1016/j.apsusc.2022.155765
Bayraktar, M., Liu, F., Versolato, O.
, & Bijkerk, F. (2023).
EUV Source Metrology. In V. Bakshi (Ed.),
Photon Sources for Lithography and Metrology (pp. 509-535)
https://doi.org/10.1117/3.2638242.ch13
Lucke, P.
, Nematollahi, M.
, Bayraktar, M.
, Yakshin, A. E.
, Elshof, J. E. T.
, & Bijkerk, F. (2022).
Influence of the Template Layer on the Structure and Ferroelectric Properties of PbZr0.52Ti0.48O3 Films.
ACS Omega,
7(26), 22210-22220. Advance online publication.
https://doi.org/10.1021/acsomega.2c00815
Chandrasekaran, A. (2022).
Surface and interface diffusion processes in nanoscale thin films. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036554763
Shafikov, A. (2022).
Fracture behavior and characterization of free-standing metal silicide thin films. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036554251
Schurink, B.
, van den Beld, W.
, Tiggelaar, R. M.
, van de Kruijs, R. W. E.
, & Bijkerk, F. (2022).
Synthesis and Characterization of Boron Thin Films Using Chemical and Physical Vapor Depositions.
Coatings,
12 (5), Article 685. Advance online publication.
https://doi.org/10.3390/coatings12050685
Phadke, P.
, Zameshin, A. A.
, Sturm, J. M.
, van de Kruijs, R. W. E.
, & Bijkerk, F. (2022).
Sputter yields of monoatomic solids by Ar and Ne ions near the threshold: A Bayesian analysis of the Yamamura Model.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms,
520, 29-39. Advance online publication.
https://doi.org/10.1016/j.nimb.2022.03.016
Shafikov, A.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, Schurink, B.
, van den Beld, W. T. E.
, Houweling, Z. S.
, Kooi, B. J.
, Ahmadi, M., de Graaf, S.
, & Bijkerk, F. (2022).
Relation between composition and fracture strength in off-stoichiometric metal silicide free-standing membranes.
Intermetallics,
144, Article 107531.
https://doi.org/10.1016/j.intermet.2022.107531
Kizir, S. (2022).
Nucleation, growth and hydrogen resistance of multi-layer graphene. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036552820
Shafikov, A.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, van den Beld, W.
, Houweling, S.
, & Bijkerk, F. (2022).
Fracture Toughness of Free-Standing ZrSiₓ Thin Films Measured Using Crack-on-a-Chip Method.
Journal of microelectromechanical systems,
31(1), 63-73. Advance online publication.
https://doi.org/10.1109/JMEMS.2021.3128760
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Universiteit Twente
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7522NH Enschede
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Universiteit Twente
Faculty of Science and Technology
Carré
C2025
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7500 AE Enschede