Nanolab

ir.ing. H. Veltkamp MSc (Henk-Willem)

Technoloog / projectleider / clusterhoofd "droog etse"
EEMCS-NanoLab
Nanolab
h.veltkamp@utwente.nl
+31534895594
Visitekaartje

Expertises

  • Engineering

    • Side Wall
    • Surfaces
    • Microfluidic Channel
    • Applications
    • Sensor
    • Silicon
    • Fabrication Method

  • Physics

    • Fabrication

Organisaties

Publicaties

Jump to: 2024 | 2023 | 2022 | 2021 | 2020 | 2019

2024

Next-Generation ATR-IR Devices for Monitoring Chemical Processes (2024)In Next-Generation ATR-IR Devices for Monitoring Chemical Processes. Srivastava, K., Ramaswami, B., Veltkamp, H.-W., Boyle, N., Flaman, G., Bomer, J. G., van den Berg, A., van der Stam, W., Burgess, I. & Odijk, M.Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes (2024)In 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808). Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/mems58180.2024.10439445Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters (2024)In The 5th Conference on MicroFluidic Handling Systems (pp. 53-56). Bonnema, M. J. S., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.WIRE SUSPENDED ON A V-GROOVE CAVITY TO MEASURE GAS PHYSICAL PROPERTIES (2024)[Book/Report › Report]. Azadi Kenari, S., Wiegerink, R. J., Batenburg, K. M., Veltkamp, H.-W., Sanders, R. G. P. & Lotterman, H.https://heidelberg-instruments.com/wp-content/uploads/2024/05/Heidelberg-Instruments-Application-Note_Suspended-Wires-V1.3.pdf

2023

Thermal Flow Meter with Integrated Thermal Conductivity Sensor (2023)Micromachines, 14(7). Article 1280. Azadi Kenari, S., Wiegerink, R. J., Veltkamp, H.-W., Sanders, R. G. P. & Lötters, J. C.https://doi.org/10.3390/mi14071280

2022

A miniature microclimate thermal flow sensor for horticultural applications (2022)In 2022 IEEE Sensors. Article 9967348. IEEE. Alveringh, D., Bijsterveld, D. G., Berg, T. E. v. d., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Lötters, J. C. & Wiegerink, R. J.https://doi.org/10.1109/SENSORS52175.2022.9967348Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD (2022)Micromachines, 13(11). Article 1908. Veltkamp, H.-W., Janssens, Y. L., de Boer, M. J., Zhao, Y., Wiegerink, R. J., Tas, N. R. & Lötters, J. C.https://doi.org/10.3390/mi13111908Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout (2022)In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE. Alveringh, D., van der Ven, D. L., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Fernandez Rivas, D. & Wiegerink, R. J.https://doi.org/10.1109/MEMS51670.2022.9699639

2021

A 3D polydimethylsiloxane microhourglass-shaped channel array made by reflowing photoresist structures for engineering a blood capillary network (2021)Methods, 190, 63-71. Rho, H. S., Veltkamp, H.-W., Baptista, D., Gardeniers, H., le Gac, S. & Habibović, P.https://doi.org/10.1016/j.ymeth.2020.03.007Sacrificial grid release technology: A versatile release concept for MEMS structures (2021)Journal of micromechanics and microengineering, 31(4). Article 045013. Zhao, Y., Janssens, Y. L., Veltkamp, H. W., de Boer, M. J., Groenesteijn, J., Tas, N. R., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/abe7daMicroelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel (2021)[Patent › Patent]. Yariesbouei, M., Sparreboom, W., Groenesteijn, J., van Putten, J. H., de Boer, M. J., Wiegerink, R. J., Veltkamp, H.-W., Yu, Q., Rodriguez Olguin, M. A. & Lötters, J. C.https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829

2020

Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology (2020)Micromachines, 11(6). Article 561. Zhao, Y., Veltkamp, H.-W., Schut, T. V. P., Sanders, R. G. P., Breazu, B., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/MI11060561Systematic Investigation of Insulin Fibrillation on a Chip (2020)Molecules, 25(6). Article 1380. Rho, H. S., Veltkamp, H.-W., Hanke, A. T., Ottens, M., Breukers, C., Habibović, P. & Gardeniers, H.https://doi.org/10.3390/molecules25061380Disposable DNA Amplification Chips with Integrated Low-Cost Heaters (2020)Micromachines, 11(3). Article 238. Veltkamp, H.-W., Akegawa Monteiro, F., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/mi11030238

2019

A simple and robust fabrication method for creating 3D tapered polydimethylsiloxane channels (2019)In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1156-1157). Rho, H. S., Veltkamp, H.-W., Baptista, D., le Gac, S. & Habibovic, P.High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology (2019)In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 648-651). Article 8870667. IEEE. Veltkamp, H. W., Zhao, Y., De Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lotters, J. C.https://doi.org/10.1109/MEMSYS.2019.8870667Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future? (2019)[Contribution to conference › Abstract] Combura Symposium 2019. Veltkamp, H.-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor (2019)[Contribution to conference › Paper] 4th Conference on MicroFluidic Handling Systems, MFHS 2019. Yu, Q., Veltkamp, H.-W., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology (2019)[Contribution to conference › Paper] 4th Conference on MicroFluidic Handling Systems, MFHS 2019. Zhao, Y., Veltkamp, H.-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.Towards 3D printed microfluidic devices in α-alumina (2019)[Contribution to conference › Paper] 4th Conference on MicroFluidic Handling Systems, MFHS 2019. Veltkamp, H.-W., Zhao, Y., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C.Towards a fully integrated and disposable DNA amplification chip (2019)[Contribution to conference › Paper] 4th Conference on MicroFluidic Handling Systems, MFHS 2019. Akegawa Monteiro, F., Veltkamp, H.-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C.A short post-processing method for high aspect ratio trenches after Bosch etching (2019)[Contribution to conference › Abstract] 45th International Conference on Micro- and Nano-Engineering, MNE 2019. Veltkamp, H.-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels (2019)[Contribution to conference › Abstract] 45th International Conference on Micro- and Nano-Engineering, MNE 2019. Zhao, Y., Veltkamp, H.-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.

Onderzoeksprofielen

Lopende projecten

Geïntegreerde Wobbe Index Meter

STW project 13952

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