ir.ing. H. Veltkamp MSc (Henk-Willem)

Engineering & Materials Science

# Microfluidics
# Silicon

Physics & Astronomy

# Chips
# Fabrication
# Fluidics
# Heaters
# Microchannels
# Silicon

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Integrated Devices and Systems (IDS)
Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Nanolab (NanoLab)

Veltkamp, H. W., Janssens, Y. L. , de Boer, M. J. , Zhao, Y. , Wiegerink, R. J. , Tas, N. R. , & Lötters, J. C. (2022). Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD. Micromachines, 13(11), [1908]. https://doi.org/10.3390/mi13111908

Alveringh, D., Bijsterveld, D. G., Berg, T. E. V. D. , Veltkamp, H-W. , Batenburg, K. M. , Sanders, R. G. P. , Lötters, J. C. , & Wiegerink, R. J. (2022). A miniature microclimate thermal flow sensor for horticultural applications. In 2022 IEEE Sensors [9967348] IEEE. https://doi.org/10.1109/SENSORS52175.2022.9967348

Alveringh, D. , van der Ven, D. L. , Veltkamp, H-W. , Batenburg, K. M. , Sanders, R. G. P. , Fernandez Rivas, D. , & Wiegerink, R. J. (2022). Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout. In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699639

Yariesbouei, M. , Sparreboom, W. , Groenesteijn, J. , van Putten, J. H. , de Boer, M. J. , Wiegerink, R. J. , Veltkamp, H-W., Yu, Q., Rodriguez Olguin, M. A. , & Lötters, J. C. (2021). Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No. WO2021054829). https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829

Zhao, Y., Janssens, Y. L. , Veltkamp, H. W. , De Boer, M. J. , Groenesteijn, J. , Tas, N. R. , Wiegerink, R. J. , & Lötters, J. C. (2021). Sacrificial grid release technology: A versatile release concept for MEMS structures. Journal of micromechanics and microengineering, 31(4), [045013]. https://doi.org/10.1088/1361-6439/abe7da

Rho, H. S. , Veltkamp, H-W., Baptista, D. , Gardeniers, H. , le Gac, S. , & Habibovic, P. (2021). A 3D polydimethylsiloxane microhourglass-shaped channel array made by reflowing photoresist structures for engineering a blood capillary network. Methods, 190, 63-71. https://doi.org/10.1016/j.ymeth.2020.03.007

Zhao, Y. , Veltkamp, H. W., Schut, T. V. P. , Sanders, R. G. P., Breazu, B. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2020). Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology. Micromachines, 11(6), [561]. https://doi.org/10.3390/MI11060561

Veltkamp, H-W., Akegawa Monteiro, F. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2020). Disposable DNA Amplification Chips with Integrated Low-Cost Heaters. Micromachines, 11(3), [238]. https://doi.org/10.3390/mi11030238

Rho, H. S. , Veltkamp, H-W., Hanke, A. T., Ottens, M. , Breukers, C. , Habibović, P. , & Gardeniers, H. (2020). Systematic Investigation of Insulin Fibrillation on a Chip. Molecules, 25(6), [1380]. https://doi.org/10.3390/molecules25061380

Veltkamp, H-W. , Zhao, Y. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards 3D printed microfluidic structures in alumina. In Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 120-121).

Zhao, Y. , Hueting, R. , Veltkamp, H-W. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Device simulation of heavily doped silicon electrical resistivity at extremely high temperatures. In Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop 2019 (pp. 108-109). University of Twente.

Akegawa Monteiro, F. , Veltkamp, H-W. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a disposable polymer-based micro-bioreactor. In Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 78-79).

Veltkamp, H. W. , Zhao, Y. , De Boer, M. J. , Sanders, R. G. P. , Wiegerink, R. J. , & Lotters, J. C. (2019). High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 648-651). [8870667] IEEE. https://doi.org/10.1109/MEMSYS.2019.8870667

Rho, H. S. , Veltkamp, H-W., Baptista, D. , le Gac, S. , & Habibovic, P. (2019). A simple and robust fabrication method for creating 3D tapered polydimethylsiloxane channels. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1156-1157)

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?. 30-31. Abstract from Combura Symposium 2019, Soesterberg, Netherlands.

Veltkamp, H-W. , Zhao, Y. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards 3D printed microfluidic devices in α-alumina. 156-159. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Akegawa Monteiro, F. , Veltkamp, H-W. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a fully integrated and disposable DNA amplification chip. 128-131. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Zhao, Y. , Veltkamp, H-W., Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 116-119. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Yu, Q. , Veltkamp, H-W. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. 103-105. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Zhao, Y. , Veltkamp, H-W., Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). A short post-processing method for high aspect ratio trenches after Bosch etching. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology. In 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 32, pp. 648-651). IEEE.

Jonker, D. , Veltkamp, H. W. , Sanders, R. G. P. , Schlautmann, S., Giannasi, K. , Tiggelaar, R. M. , & Gardeniers, J. G. E. (2019). A factorial design approach to fracture pressure tests of microfluidic BF33 and D263T glass chips with side-port capillary connections. Journal of micromechanics and microengineering, 29(3), [035011]. https://doi.org/10.1088/1361-6439/aafe5b

Zhao, Y. , Veltkamp, H-W. , de Boer, M. J. , Zeng, Y. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10). University of Twente.

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Trench-assisted surface channel technology (TASCT) as platform for high-temperature physical parameter sensing. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 9). University of Twente.

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h.veltkamp@utwente.nl

orcid.org/0000-0002-6044-5891

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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab (gebouwnr. 16)
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7522NH Enschede

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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab
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