ir.ing. H. Veltkamp MSc (Henk-Willem)

Projectleider / procestechnoloog
EEMCS-NanoLab
Nanolab
h.veltkamp@utwente.nl
+31534895594
Visitekaartje

Expertises

  • Engineering

    • Side Wall
    • Surfaces
    • Microfluidic Channel
    • Applications
    • Sensor
    • Silicon
    • Fabrication Method

  • Physics

    • Fabrication

Organisaties

Publicaties

2024
Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall ElectrodesIn 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808). Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/mems58180.2024.10439445Microfabrication Technology for Isolated Silicon Sidewall Electrodes and HeatersIn The 5th Conference on MicroFluidic Handling Systems (pp. 53-56). Bonnema, M. J. S., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.
2023
Thermal Flow Meter with Integrated Thermal Conductivity Sensor, Article 1280. Azadi Kenari, S., Wiegerink, R. J., Veltkamp, H.-W., Sanders, R. G. P. & Lötters, J. C.https://doi.org/10.3390/mi14071280
2022
A miniature microclimate thermal flow sensor for horticultural applicationsIn 2022 IEEE Sensors, Article 9967348. IEEE. Alveringh, D., Bijsterveld, D. G., Berg, T. E. v. d., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Lötters, J. C. & Wiegerink, R. J.https://doi.org/10.1109/SENSORS52175.2022.9967348Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD, Article 1908. Veltkamp, H.-W., Janssens, Y. L., de Boer, M. J., Zhao, Y., Wiegerink, R. J., Tas, N. R. & Lötters, J. C.https://doi.org/10.3390/mi13111908Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readoutIn 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE. Alveringh, D., van der Ven, D. L., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Fernandez Rivas, D. & Wiegerink, R. J.https://doi.org/10.1109/MEMS51670.2022.9699639
2021
A 3D polydimethylsiloxane microhourglass-shaped channel array made by reflowing photoresist structures for engineering a blood capillary network, 63-71. Rho, H. S., Veltkamp, H.-W., Baptista, D., Gardeniers, H., le Gac, S. & Habibović, P.https://doi.org/10.1016/j.ymeth.2020.03.007Sacrificial grid release technology: A versatile release concept for MEMS structures, Article 045013. Zhao, Y., Janssens, Y. L., Veltkamp, H. W., de Boer, M. J., Groenesteijn, J., Tas, N. R., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/abe7daMicroelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. Yariesbouei, M., Sparreboom, W., Groenesteijn, J., van Putten, J. H., de Boer, M. J., Wiegerink, R. J., Veltkamp, H.-W., Yu, Q., Rodriguez Olguin, M. A. & Lötters, J. C.https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829
2020
Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology, Article 561. Zhao, Y., Veltkamp, H.-W., Schut, T. V. P., Sanders, R. G. P., Breazu, B., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/MI11060561Systematic Investigation of Insulin Fibrillation on a Chip, Article 1380. Rho, H. S., Veltkamp, H.-W., Hanke, A. T., Ottens, M., Breukers, C., Habibović, P. & Gardeniers, H.https://doi.org/10.3390/molecules25061380Disposable DNA Amplification Chips with Integrated Low-Cost Heaters, Article 238. Veltkamp, H.-W., Akegawa Monteiro, F., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/mi11030238
2019
A simple and robust fabrication method for creating 3D tapered polydimethylsiloxane channelsIn 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1156-1157). Rho, H. S., Veltkamp, H.-W., Baptista, D., le Gac, S. & Habibovic, P.High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel TechnologyIn 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019, Article 8870667 (pp. 648-651). IEEE. Veltkamp, H. W., Zhao, Y., De Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lotters, J. C.https://doi.org/10.1109/MEMSYS.2019.8870667Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?, 30-31. Veltkamp, H.-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor, 103-105. Yu, Q., Veltkamp, H.-W., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology, 116-119. Zhao, Y., Veltkamp, H.-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.Towards a fully integrated and disposable DNA amplification chip, 128-131. Akegawa Monteiro, F., Veltkamp, H.-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C.Towards 3D printed microfluidic devices in α-alumina, 156-159. Veltkamp, H.-W., Zhao, Y., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C.A short post-processing method for high aspect ratio trenches after Bosch etching. Veltkamp, H.-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Zhao, Y., Veltkamp, H.-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C.

Onderzoeksprofielen

Lopende projecten

Geïntegreerde Wobbe Index Meter

STW project 13952

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