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Engineering & Materials Science
# Microfluidics
# Silicon
Physics & Astronomy
# Chips
# Fabrication
# Fluidics
# Heaters
# Microchannels
# Silicon
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Publicaties
Recent
Bonnema, M. J. S.
, Veltkamp, H.-W.
, Wiegerink, R. J.
, & Lötters, J. C. (2024).
Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters. In
The 5th Conference on MicroFluidic Handling Systems (pp. 53-56).
Bonnema, M. J. S.
, Veltkamp, H.-W.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2024).
Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes. In
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808).
https://doi.org/10.1109/mems58180.2024.10439445
Azadi Kenari, S.
, Wiegerink, R. J.
, Veltkamp, H.-W.
, Sanders, R. G. P.
, & Lötters, J. C. (2023).
Thermal Flow Meter with Integrated Thermal Conductivity Sensor.
Micromachines,
14(7), Article 1280.
https://doi.org/10.3390/mi14071280
Veltkamp, H.-W., Janssens, Y. L.
, de Boer, M. J.
, Zhao, Y.
, Wiegerink, R. J.
, Tas, N. R.
, & Lötters, J. C. (2022).
Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD.
Micromachines,
13(11), Article 1908.
https://doi.org/10.3390/mi13111908
Alveringh, D., Bijsterveld, D. G., Berg, T. E. V. D.
, Veltkamp, H.-W.
, Batenburg, K. M.
, Sanders, R. G. P.
, Lötters, J. C.
, & Wiegerink, R. J. (2022).
A miniature microclimate thermal flow sensor for horticultural applications. In
2022 IEEE Sensors Article 9967348 IEEE.
https://doi.org/10.1109/SENSORS52175.2022.9967348
Alveringh, D.
, van der Ven, D. L.
, Veltkamp, H.-W.
, Batenburg, K. M.
, Sanders, R. G. P.
, Fernandez Rivas, D.
, & Wiegerink, R. J. (2022).
Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout. In
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE.
https://doi.org/10.1109/MEMS51670.2022.9699639
Yariesbouei, M.
, Sparreboom, W.
, Groenesteijn, J.
, van Putten, J. H.
, de Boer, M. J.
, Wiegerink, R. J.
, Veltkamp, H.-W., Yu, Q., Rodriguez Olguin, M. A.
, & Lötters, J. C. (2021).
Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No.
WO2021054829).
https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829
Zhao, Y., Janssens, Y. L.
, Veltkamp, H. W.
, de Boer, M. J.
, Groenesteijn, J.
, Tas, N. R.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Sacrificial grid release technology: A versatile release concept for MEMS structures.
Journal of micromechanics and microengineering,
31(4), Article 045013.
https://doi.org/10.1088/1361-6439/abe7da
Rho, H. S.
, Veltkamp, H.-W., Baptista, D.
, Gardeniers, H.
, le Gac, S.
, & Habibović, P. (2021).
A 3D polydimethylsiloxane microhourglass-shaped channel array made by reflowing photoresist structures for engineering a blood capillary network.
Methods,
190, 63-71.
https://doi.org/10.1016/j.ymeth.2020.03.007
Zhao, Y.
, Veltkamp, H.-W., Schut, T. V. P.
, Sanders, R. G. P., Breazu, B.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2020).
Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology.
Micromachines,
11(6), Article 561.
https://doi.org/10.3390/MI11060561
Veltkamp, H.-W., Akegawa Monteiro, F.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2020).
Disposable DNA Amplification Chips with Integrated Low-Cost Heaters.
Micromachines,
11(3), Article 238.
https://doi.org/10.3390/mi11030238
Rho, H. S.
, Veltkamp, H.-W., Hanke, A. T., Ottens, M.
, Breukers, C.
, Habibović, P.
, & Gardeniers, H. (2020).
Systematic Investigation of Insulin Fibrillation on a Chip.
Molecules,
25(6), Article 1380.
https://doi.org/10.3390/molecules25061380
Veltkamp, H.-W.
, Zhao, Y.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Towards 3D printed microfluidic structures in alumina. In
Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 120-121).
Zhao, Y.
, Hueting, R.
, Veltkamp, H.-W.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Device simulation of heavily doped silicon electrical resistivity at extremely high temperatures. In
Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop 2019 (pp. 108-109). University of Twente.
Akegawa Monteiro, F.
, Veltkamp, H.-W.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Towards a disposable polymer-based micro-bioreactor. In
Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 78-79).
Veltkamp, H. W.
, Zhao, Y.
, De Boer, M. J.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lotters, J. C. (2019).
High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology. In
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 648-651). Article 8870667 IEEE.
https://doi.org/10.1109/MEMSYS.2019.8870667
Rho, H. S.
, Veltkamp, H.-W., Baptista, D.
, le Gac, S.
, & Habibovic, P. (2019).
A simple and robust fabrication method for creating 3D tapered polydimethylsiloxane channels. In
23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1156-1157)
Veltkamp, H.-W.
, Zhao, Y.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?. 30-31. Abstract from Combura Symposium 2019, Soesterberg, Netherlands.
Veltkamp, H.-W.
, Zhao, Y.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Towards 3D printed microfluidic devices in α-alumina. 156-159. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Akegawa Monteiro, F.
, Veltkamp, H.-W.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Towards a fully integrated and disposable DNA amplification chip. 128-131. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Zhao, Y.
, Veltkamp, H.-W., Schut, T. V. P.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 116-119. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Yu, Q.
, Veltkamp, H.-W.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. 103-105. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Zhao, Y.
, Veltkamp, H.-W., Schut, T. V. P.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.
Veltkamp, H.-W.
, Zhao, Y.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
A short post-processing method for high aspect ratio trenches after Bosch etching. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.
Veltkamp, H.-W.
, Zhao, Y.
, de Boer, M. J.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology. In
2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 32, pp. 648-651). IEEE.
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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab
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7500 AE Enschede