ir.ing. H. Veltkamp MSc (Henk-Willem)

Engineering & Materials Science

# Microfluidics
# Silicon

Physics & Astronomy

# Chips
# Fabrication
# Fluidics
# Heaters
# Microchannels
# Silicon

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Integrated Devices and Systems (IDS)
Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Nanolab (NanoLab)

Veltkamp, H-W., Janssens, Y. L. , de Boer, M. J. , Zhao, Y. , Wiegerink, R. J. , Tas, N. R. , & Lötters, J. C. (2022). Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD. Micromachines, 13(11), Article 1908. https://doi.org/10.3390/mi13111908

Alveringh, D., Bijsterveld, D. G., Berg, T. E. V. D. , Veltkamp, H-W. , Batenburg, K. M. , Sanders, R. G. P. , Lötters, J. C. , & Wiegerink, R. J. (2022). A miniature microclimate thermal flow sensor for horticultural applications. In 2022 IEEE Sensors Article 9967348 IEEE. https://doi.org/10.1109/SENSORS52175.2022.9967348

Alveringh, D. , van der Ven, D. L. , Veltkamp, H-W. , Batenburg, K. M. , Sanders, R. G. P. , Fernandez Rivas, D. , & Wiegerink, R. J. (2022). Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout. In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699639

Yariesbouei, M. , Sparreboom, W. , Groenesteijn, J. , van Putten, J. H. , de Boer, M. J. , Wiegerink, R. J. , Veltkamp, H-W., Yu, Q., Rodriguez Olguin, M. A. , & Lötters, J. C. (2021). Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No. WO2021054829). https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829

Zhao, Y., Janssens, Y. L. , Veltkamp, H. W. , de Boer, M. J. , Groenesteijn, J. , Tas, N. R. , Wiegerink, R. J. , & Lötters, J. C. (2021). Sacrificial grid release technology: A versatile release concept for MEMS structures. Journal of micromechanics and microengineering, 31(4), Article 045013. https://doi.org/10.1088/1361-6439/abe7da

Rho, H. S. , Veltkamp, H-W., Baptista, D. , Gardeniers, H. , le Gac, S. , & Habibović, P. (2021). A 3D polydimethylsiloxane microhourglass-shaped channel array made by reflowing photoresist structures for engineering a blood capillary network. Methods, 190, 63-71. Advance online publication. https://doi.org/10.1016/j.ymeth.2020.03.007

Zhao, Y. , Veltkamp, H-W., Schut, T. V. P. , Sanders, R. G. P., Breazu, B. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2020). Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology. Micromachines, 11(6), Article 561. https://doi.org/10.3390/MI11060561

Veltkamp, H-W., Akegawa Monteiro, F. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2020). Disposable DNA Amplification Chips with Integrated Low-Cost Heaters. Micromachines, 11(3), Article 238. Advance online publication. https://doi.org/10.3390/mi11030238

Rho, H. S. , Veltkamp, H-W., Hanke, A. T., Ottens, M. , Breukers, C. , Habibović, P. , & Gardeniers, H. (2020). Systematic Investigation of Insulin Fibrillation on a Chip. Molecules, 25(6), Article 1380. https://doi.org/10.3390/molecules25061380

Veltkamp, H-W. , Zhao, Y. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards 3D printed microfluidic structures in alumina. In Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 120-121).

Zhao, Y. , Hueting, R. , Veltkamp, H-W. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Device simulation of heavily doped silicon electrical resistivity at extremely high temperatures. In Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop 2019 (pp. 108-109). University of Twente.

Akegawa Monteiro, F. , Veltkamp, H-W. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a disposable polymer-based micro-bioreactor. In Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 78-79).

Veltkamp, H. W. , Zhao, Y. , De Boer, M. J. , Sanders, R. G. P. , Wiegerink, R. J. , & Lotters, J. C. (2019). High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 648-651). Article 8870667 IEEE. https://doi.org/10.1109/MEMSYS.2019.8870667

Rho, H. S. , Veltkamp, H-W., Baptista, D. , le Gac, S. , & Habibovic, P. (2019). A simple and robust fabrication method for creating 3D tapered polydimethylsiloxane channels. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1156-1157)

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?. 30-31. Abstract from Combura Symposium 2019, Soesterberg, Netherlands.

Veltkamp, H-W. , Zhao, Y. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards 3D printed microfluidic devices in α-alumina. 156-159. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Akegawa Monteiro, F. , Veltkamp, H-W. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a fully integrated and disposable DNA amplification chip. 128-131. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Zhao, Y. , Veltkamp, H-W., Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 116-119. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Yu, Q. , Veltkamp, H-W. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. 103-105. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Zhao, Y. , Veltkamp, H-W., Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). A short post-processing method for high aspect ratio trenches after Bosch etching. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology. In 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 32, pp. 648-651). IEEE.

Jonker, D. , Veltkamp, H. W. , Sanders, R. G. P. , Schlautmann, S., Giannasi, K. , Tiggelaar, R. M. , & Gardeniers, J. G. E. (2019). A factorial design approach to fracture pressure tests of microfluidic BF33 and D263T glass chips with side-port capillary connections. Journal of micromechanics and microengineering, 29(3), Article 035011. Advance online publication. https://doi.org/10.1088/1361-6439/aafe5b

Zhao, Y. , Veltkamp, H-W. , de Boer, M. J. , Zeng, Y. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10). University of Twente.

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Trench-assisted surface channel technology (TASCT) as platform for high-temperature physical parameter sensing. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 9). University of Twente.

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Nanotechnology

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h.veltkamp@utwente.nl

orcid.org/0000-0002-6044-5891

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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab (gebouwnr. 16)
Hallenweg 23
7522NH Enschede

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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab
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