Nanolab

ir.ing. H. Veltkamp MSc (Henk-Willem)

Hoofd etscluster / technoloog / projectleider
NANO
Nanolab 1002A
h.veltkamp@utwente.nl
+31534895594
Visitekaartje

Expertises

  • Engineering

    • Side Wall
    • Microfluidic Channel
    • Surfaces
    • Applications
    • Sensor
    • Silicon
    • Fabrication Method

  • Physics

    • Fabrication

Organisaties

Publicaties

Jump to: 2025 | 2024 | 2023 | 2022 | 2021

2025

A Silicon-Based Combined Hot-Element and Calorimetric Anemometer (2025)IEEE sensors journal, 25(13), 23645-23652. Hackett, T. L., Veltkamp, H.-W., Sanders, R. G. P., van den Berg, T. E., Alveringh, D. & Schmitz, J.https://doi.org/10.1109/JSEN.2025.3570456

2024

Flow-through Microfluidic Relative Permittivity Sensor Using Highly-Doped Silicon Sidewall Electrodes (2024)Journal of micromechanics and microengineering, 34(11). Article 115002. Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad7ec6Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching (2024)Micromachines, 15(10). Article 1230. Yu, Q., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/mi15101230Next-Generation ATR-IR Devices for Monitoring Chemical Processes (2024)In Next-Generation ATR-IR Devices for Monitoring Chemical Processes. Srivastava, K., Ramaswami, B., Veltkamp, H.-W., Boyle, N., Flaman, G., Bomer, J. G., van den Berg, A., van der Stam, W., Burgess, I. & Odijk, M.Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes (2024)In 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808). Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/mems58180.2024.10439445Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters (2024)In The 5th Conference on MicroFluidic Handling Systems (pp. 53-56). Bonnema, M. J. S., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.A Method for Comparing Dry Etch Equipment (2024)In 2024 16th International Symposium on Electronics and Telecommunications, ISETC 2024 - Conference Proceedings. IEEE. Avram, A., Veltkamp, H. W., Elias, M., Ronchin, S., De Boer, C., Hovik, J. & De Boer, M.https://doi.org/10.1109/ISETC63109.2024.10797425WIRE SUSPENDED ON A V-GROOVE CAVITY TO MEASURE GAS PHYSICAL PROPERTIES (2024)[Book/Report › Report]. Azadi Kenari, S., Wiegerink, R. J., Batenburg, K. M., Veltkamp, H.-W., Sanders, R. G. P. & Lotterman, H.https://heidelberg-instruments.com/wp-content/uploads/2024/05/Heidelberg-Instruments-Application-Note_Suspended-Wires-V1.3.pdf

2023

Thermal Flow Meter with Integrated Thermal Conductivity Sensor (2023)Micromachines, 14(7). Article 1280. Azadi Kenari, S., Wiegerink, R. J., Veltkamp, H.-W., Sanders, R. G. P. & Lötters, J. C.https://doi.org/10.3390/mi14071280

2022

A miniature microclimate thermal flow sensor for horticultural applications (2022)In 2022 IEEE Sensors. Article 9967348. IEEE. Alveringh, D., Bijsterveld, D. G., Berg, T. E. v. d., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Lötters, J. C. & Wiegerink, R. J.https://doi.org/10.1109/SENSORS52175.2022.9967348Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD (2022)Micromachines, 13(11). Article 1908. Veltkamp, H.-W., Janssens, Y. L., de Boer, M. J., Zhao, Y., Wiegerink, R. J., Tas, N. R. & Lötters, J. C.https://doi.org/10.3390/mi13111908Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout (2022)In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE. Alveringh, D., van der Ven, D. L., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Fernandez Rivas, D. & Wiegerink, R. J.https://doi.org/10.1109/MEMS51670.2022.9699639

2021

A 3D polydimethylsiloxane microhourglass-shaped channel array made by reflowing photoresist structures for engineering a blood capillary network (2021)Methods, 190, 63-71. Rho, H. S., Veltkamp, H.-W., Baptista, D., Gardeniers, H., le Gac, S. & Habibović, P.https://doi.org/10.1016/j.ymeth.2020.03.007Sacrificial grid release technology: A versatile release concept for MEMS structures (2021)Journal of micromechanics and microengineering, 31(4). Article 045013. Zhao, Y., Janssens, Y. L., Veltkamp, H. W., de Boer, M. J., Groenesteijn, J., Tas, N. R., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/abe7daMicroelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel (2021)[Patent › Patent]. Yariesbouei, M., Sparreboom, W., Groenesteijn, J., van Putten, J. H., de Boer, M. J., Wiegerink, R. J., Veltkamp, H.-W., Yu, Q., Rodriguez Olguin, M. A. & Lötters, J. C.https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829

Onderzoeksprofielen

Lopende projecten

Geïntegreerde Wobbe Index Meter

STW project 13952

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