Expertises

  • Engineering

    • Flow Sensor
    • Mass Flow
    • Surfaces
    • Fabrication
    • Design
  • Chemistry

    • Sensor
  • Physics

    • Flowmeter
    • Detection

Organisaties

Nevenwerkzaakheden

  • Innovative Sensor Technology IST-AGDirector Research & Development

Publicaties

2025

Inline Microfluidic Thermal Conductivity Sensor Using A Suspended Silicon Heater (2025)In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 169-172). IEEE. Bonnema, M., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/MEMS61431.2025.10917777Gas-compensated thermal flow sensor using an integrated velocity-independent gas properties meter (2025)Journal of micromechanics and microengineering, 35. Article 015003. Azadi Kenari, S., Wiegerink, R. J., Sanders, R. G. P. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad99e3Towards a gas independent thermal flow meter (2025)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. Azadi Kenari, S.https://doi.org/10.3990/1.9789036564243Micro coriolis mass flow sensor with large channel diameter by wet etching of silicon (2025)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. Yu, Q.https://doi.org/10.3990/1.9789036563598

2024

Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching (2024)Sensors (Switzerland), 24(24). Article 7952. Yu, Q., Bonnema, M., Yariesbouei, M., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/s24247952Flow-through Microfluidic Relative Permittivity Sensor Using Highly-Doped Silicon Sidewall Electrodes (2024)Journal of micromechanics and microengineering, 34(11). Article 115002. Bonnema, M., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad7ec6Method for detecting fluid parameters using a flow sensor configuration (2024)[Patent › Patent]. Alveringh, D., Le, D. V., Groenesteijn, J. & Lötters, J. C.https://patents.google.com/patent/NL2034449B1/Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching (2024)Micromachines, 15(10). Article 1230. Yu, Q., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/mi15101230Method for determining a flow rate of a fluid independent of the thermal proprties of the fluid (2024)[Patent › Patent]. Azadi Kenari, S., Lötters, J. C., Sanders, R. G. P. & Wiegerink, R. J.Thermal Flow sensor for determining a flow rate of a fluid (2024)[Patent › Patent]. Azadi Kenari, S., Lötters, J. C., Sanders, R. G. P. & Wiegerink, R. J.

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