prof.dr.ir. J.C. Lötters (Joost)

Physics & Astronomy

# Actuation
# Chips
# Mass Flow
# Sensors

Engineering & Materials Science

# Fabrication
# Microfluidics
# Sensors
# Silicon

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Integrated Devices and Systems (IDS)

Veltkamp, H. W., Janssens, Y. L. , de Boer, M. J. , Zhao, Y. , Wiegerink, R. J. , Tas, N. R. , & Lötters, J. C. (2022). Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD. Micromachines, 13(11), [1908]. https://doi.org/10.3390/mi13111908

Alveringh, D., Bijsterveld, D. G., Berg, T. E. V. D. , Veltkamp, H-W. , Batenburg, K. M. , Sanders, R. G. P. , Lötters, J. C. , & Wiegerink, R. J. (2022). A miniature microclimate thermal flow sensor for horticultural applications. In 2022 IEEE Sensors [9967348] IEEE/EUCA. https://doi.org/10.1109/SENSORS52175.2022.9967348

Azadi Kenari, S. , Wiegerink, R. J. , & Lötters, J. C. (2022). Bi-Directional MEMS Thermal Flow Sensor for Respiratory Applications. Paper presented at MNE-EUROSENSORS 2022, Leuven, Belgium.

Yariesbouei, M. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2022). 3D printed Coriolis mass flow sensor.

Zeng, Y. (2022). Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036553636

Yariesbouei, M. , Sanders, R. G. P., Moazzenzade, T. , Wiegerink, R. J. , & Lötters, J. C. (2022). Free Suspended Thin-Walled Nickel Electroplated Tubes for Microfluidic Density and Mass Flow Sensors. Journal of microelectromechanical systems, 31(3), 408-414. https://doi.org/10.1109/JMEMS.2022.3149632

Yariesbouei, M. , Sparreboom, W. , Groenesteijn, J. , van Putten, J. H. , de Boer, M. J. , Wiegerink, R. J. , Veltkamp, H-W., Yu, Q., Rodriguez Olguin, M. A. , & Lötters, J. C. (2021). Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No. WO2021054829). https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829

Zhao, Y., Janssens, Y. L. , Veltkamp, H. W. , De Boer, M. J. , Groenesteijn, J. , Tas, N. R. , Wiegerink, R. J. , & Lötters, J. C. (2021). Sacrificial grid release technology: A versatile release concept for MEMS structures. Journal of micromechanics and microengineering, 31(4), [045013]. https://doi.org/10.1088/1361-6439/abe7da

Zeng, Y. , Groenesteijn, J. , Alveringh, D. , Wiegerink, R. J. , & Lötters, J. C. (2021). Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators. Journal of microelectromechanical systems, 30(6), 885-896. https://doi.org/10.1109/JMEMS.2021.3107744

Schut, T. V. P. (2021). Towards a thermal noise limited micro-coriolis mass flow sensor. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789083180410

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j.c.lotters@utwente.nl

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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré (gebouwnr. 15), kamer C1409
Hallenweg 23
7522NH Enschede

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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré C1409
Postbus 217
7500 AE Enschede

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Integrated Devices and Systems (IDS)

Universiteit Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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prof.dr.ir. J.C. Lötters (Joost)

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