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# Sensors
Engineering & Materials Science
# Microfluidics
# Sensors
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Publicaties
Recent
Zubavicius, R.
, Alveringh, D.
, Poel, M.
, Groenesteijn, J.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2024).
Machine learning-enhanced mass flow measurements using a Coriolis mass flow sensor. In
The 5th Conference On MicroFluidic Handling Systems (MFHS 2024) (pp. 65-68)
Zubavicius, R.
, Alveringh, D.
, Poel, M.
, Groenesteijn, J.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2024).
Fluid Viscosity and Density Determination With Machine Learning-Enhanced Coriolis Mass Flow Sensors. In
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 82-85). IEEE.
https://doi.org/10.1109/MEMS58180.2024.10439597
Bissig, H., Büker, O., Stolt, K., Graham, E., Wales, L., Furtado, A., Moura, S., Metaxiotou, Z., Lee, S. H., Kartmann, S.
, Groenesteijn, J.
, & Lötters, J. C. (2023).
In-line measurements of the physical and thermodynamic properties of single and multicomponent liquids.
Biomedizinische Technik,
68(1), 39-50.
https://doi.org/10.1515/bmt-2022-0039
Alveringh, D.
, Le, D. V.
, Groenesteijn, J.
, Schmitz, J.
, & Lötters, J. C. (2023).
Fluid classification with integrated flow and pressure sensors using machine learning.
Sensors and Actuators A: Physical,
363, Article 114762.
https://doi.org/10.1016/j.sna.2023.114762
Carnevale, L.
, Broccoli, A., Mayorga Gonzalez, R., van Swieten, T. P.
, Groenesteijn, J.
, Ma, K.
, Wiegerink, R. J., Weckhuysen, B. M., Meirer, F.
, Olthuis, W.
, & Odijk, M. (2023).
MEMS-Based Microreactor for In Situ/Operando High-Resolution 3D X-Ray Microscopy of Single Catalyst Particles. Abstract from 28th North American Catalysis Society Meeting, NAM 2023, Providence, Rhode Island, United States.
Bissig, H., Büker, O., Stolt, K., Graham, E., Wales, L., Furtado, A., Moura, S., Metaxiotou, Z., Lee, S. H., Kartmann, S.
, Groenesteijn, J.
, & Lötters, J. C. (2022).
First comparison of inline measurements of dynamic viscosity. In
19th International Flow Measurement Conference 2022, FLOMEKO 2022 International Measurement Confederation (IMEKO).
https://doi.org/10.21014/tc9-2022.061
Yariesbouei, M.
, Sparreboom, W.
, Groenesteijn, J.
, van Putten, J. H.
, de Boer, M. J.
, Wiegerink, R. J.
, Veltkamp, H.-W., Yu, Q., Rodriguez Olguin, M. A.
, & Lötters, J. C. (2021).
Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No.
WO2021054829).
https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829
De Oliveira, A. C.
, Groenesteijn, J.
, Wiegerink, R. J., & Makinwa, K. A. A. (2021).
5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. In
2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers (pp. 84-86). Article 9365946 (IEEE International Solid-State Circuits Conference (ISSCC); Vol. 2021). IEEE.
https://doi.org/10.1109/ISSCC42613.2021.9365946
Zhao, Y., Janssens, Y. L.
, Veltkamp, H. W.
, de Boer, M. J.
, Groenesteijn, J.
, Tas, N. R.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Sacrificial grid release technology: A versatile release concept for MEMS structures.
Journal of micromechanics and microengineering,
31(4), Article 045013.
https://doi.org/10.1088/1361-6439/abe7da
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators.
Journal of microelectromechanical systems,
30(6), 885-896.
https://doi.org/10.1109/JMEMS.2021.3107744
Zhao, Y.
, Veltkamp, H.-W., Schut, T. V. P.
, Sanders, R. G. P., Breazu, B.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2020).
Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology.
Micromachines,
11(6), Article 561.
https://doi.org/10.3390/MI11060561
de Oliveira, A. C., Schut, T. V. P.
, Groenesteijn, J., Fan, Q.
, Wiegerink, R. J., & Makinwa, K. A. A. (2020).
A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface. In
2019 IEEE Sensors: SENSORS 2019 - Conference Proceedings Article 8956695 (Proceedings of IEEE Sensors; Vol. 2019). IEEE.
https://doi.org/10.1109/SENSORS43011.2019.8956695
Mejri, S., Yariesbouei, M.
, Wiegerink, R. J.
, Groenesteijn, J.
, & Lötters, J. C. (2019).
Measurement of viscosity for medicine mixture. In J. Lötters (Ed.),
The 4th Conference on MicroFluidic Handling Systems: Conference Proceedings (pp. 124-127). MDPI.
Lötters, J. C.
, Groenesteijn, J.
, Steenwelle, R. J. A.
, Wiegerink, R. J.
, Alveringh, D.
, Ma, K.
, & Zeng, Y. (2019).
Coriolis flow sensor. (Patent No.
WO2019143239A8).
Zhao, Y.
, Veltkamp, H.-W., Schut, T. V. P.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 116-119. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Zhao, Y.
, Veltkamp, H.-W., Schut, T. V. P.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.
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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(gebouwnr. 15), kamer C1540
Hallenweg 21
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C1540
Postbus 217
7500 AE Enschede