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# Fabrication
# Lithography
# Silicon
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# Etching
Physics & Astronomy
# Etching
# Fabrication
# Lithography
# Wafers
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Publicaties
Recent
Kooijman, L. J., Pordeli, Y.
, Berenschot, J. W.
, & Tas, N. R. (2023).
Lateral Fractal Formation by Crystallographic Silicon Micromachining.
Fractal and Fractional,
7(2), [202].
https://doi.org/10.3390/fractalfract7020202
Berenschot, E. J. W., Pordeli, Y.
, Kooijman, L. J., Janssens, Y. L.
, Tiggelaar, R. M.
, & Tas, N. R. (2023).
3d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic Nanolithography. In
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 (pp. 639-642). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January). IEEE.
https://doi.org/10.1109/MEMS49605.2023.10052139
Lafuente, M.
, Berenschot, E. J. W.
, Tiggelaar, R. M., Rodrigo, S. G., Mallada, R.
, Tas, N. R., & Pina, M. P. (2023).
Retraction Note: Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate.
Microchimica acta,
190, [38].
https://doi.org/10.1007/s00604-022-05620-y
Arturo, S. A.
, Erwin, B.
, Niels, T., & Silke, K. (2022).
Fractals in tissue engineering. (Patent No.
NL2025961B).
Susarrey Arce, A., Krol, S.
, Berenschot, E.
, & Tas, N. (2022).
Fractals in tissue engineering. (Patent No.
WO2022005280).
Wang, K.
, Berenschot, E. J. W.
, Dijkstra, M.
, Tiggelaar, R. M.
, Martinussen, S. M.
, Chang, L.
, Hendriks, W. A. P. M.
, Borgelink, B. T. H.
, Frentrop, R. N.
, García Blanco, S. M.
, Tas, N. R.
, & Tkachuk, V. V. (2022).
Low-stress Si3N4 waveguides on sapphire substrate: (Student paper). In
ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano.
Lafuente, M.
, Berenschot, E. J. W.
, Tiggelaar, R. M.
, Susarrey Arce, A., Mallada, R., Pina, M. P.
, García Blanco, S. M.
, & Tas, N. R. (2022).
Fabrication and characterization of symmetric Au-nanostructures with SERS activity: (Student paper). In
ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano.
Schmitt, T. W., Connolly, M. R., Schleenvoigt, M., Liu, C., Kennedy, O., Chávez-Garcia, J. M., Jalil, A. R., Bennemann, B., Trellenkamp, S., Lentz, F., Neumann, E., Lindström, T., De Graaf, S. E.
, Berenschot, E.
, Tas, N., Mussler, G., Petersson, K. D., Grützmacher, D., & Schüffelgen, P. (2022).
Integration of Topological Insulator Josephson Junctions in Superconducting Qubit Circuits.
Nano letters,
22(7), 2595-2602.
https://doi.org/10.1021/acs.nanolett.1c04055
Jonker, D.
, Berenschot, E. J. W.
, Tiggelaar, R. M.
, Tas, N. R.
, Van Houselt, A.
, & Gardeniers, H. J. G. E. (2022).
A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon Nanostructures. In
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 561-564). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE.
https://doi.org/10.1109/MEMS51670.2022.9699565
Borgelink, B. T. H.
, Berenschot, E. J. W.
, Sanders, R. G. P.
, Schlautmann, S.
, Gardeniers, H.
, & Tas, N. R. (2022).
Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles. In
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 259-262). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE.
https://doi.org/10.1109/MEMS51670.2022.9699536
Borgelink, B. T. H.
, Berenschot, E. J. W.
, Sanders, R. G. P.
, Schlautmann, S.
, Tas, N. R.
, & Gardeniers, H. J. G. E. (2022).
Fabrication and characterization of microfluidic pedestal nozzles enabling geometric contact line pinning.
Sensors and Actuators B: Chemical,
365, [131943].
https://doi.org/10.1016/j.snb.2022.131943
Jonker, D.
, Berenschot, E. J. W.
, Tas, N. R.
, Tiggelaar, R. M.
, van Houselt, A.
, & Gardeniers, H. J. G. E. (2022).
Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones.
Nanoscale research letters,
17(1), [100].
https://doi.org/10.1186/s11671-022-03735-y
Berenschot, E.
, Tiggelaar, R. M.
, Borgelink, B., Van Kampen, C., Deenen, C. S., Pordeli, Y.
, Witteveen, H.
, Gardeniers, H. J. G. E.
, & Tas, N. R. (2022).
Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices.
ACS Applied Nano Materials,
5(10), 15847-15854.
https://doi.org/10.1021/acsanm.2c04079
Capuano, L.
, Berenschot, J. W.
, Tiggelaar, R. M.
, Feinaeugle, M.
, Tas, N. R.
, Gardeniers, J. G. E.
, & Römer, G. R. B. E. (2022).
Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes.
Journal of micromechanics and microengineering,
32(12), [125003].
https://doi.org/10.1088/1361-6439/ac9911
Centonze, M.
, Berenschot, E. J. W., Serrati, S.
, Susarrey-Arce, A., & Krol, S. (2022).
The Fast Track for Intestinal Tumor Cell Differentiation and In Vitro Intestinal Models by Inorganic Topographic Surfaces.
Pharmaceutics,
14(1), [218].
https://doi.org/10.3390/pharmaceutics14010218
Dituri, F., Centonze, M.
, Berenschot, E. J. W.
, Tas, N. R.
, Susarrey-Arce, A., & Krol, S. (2021).
Complex tumor spheroid formation and one‐step cancer‐ associated fibroblasts purification from hepatocellular carcinoma tissue promoted by inorganic surface topography.
Nanomaterials,
11(12), [3233].
https://doi.org/10.3390/nano11123233
Jonker, D., Jafari, Z.
, Winczewski, J. P.
, Eyovge, C.
, Berenschot, J. W.
, Tas, N. R.
, Gardeniers, J. G. E., De Leon, I.
, & Susarrey-Arce, A. (2021).
A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars.
Nanoscale Advances,
3(17), 4926-4939.
https://doi.org/10.1039/d1na00316j
Jonker, D., Jafari, Z.
, Winczewski, J. P.
, Eyovge, C.
, Berenschot, J. W.
, Tas, N. R.
, Gardeniers, J. G. E., De Leon, I.
, & Susarrey-Arce, A. (2020).
Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications. In
Novel Optical Materials and Applications, NOMA 2020 (Vol. Part F186-NOMA 2020). [143868] Optical Society of America.
https://doi.org/10.1364/NOMA.2020.NoM3C.5
Lafuente, M.
, Berenschot, E. J. W.
, Tiggelaar, R. M., Rodrigo, S. G., Mallada, R.
, Tas, N. R., & Pina, M. P. (2020).
Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate.
Microchimica acta,
187(4), [247].
https://doi.org/10.1007/s00604-020-4216-9
Van Kampen, C. P.
, Berenschot, E. J.
, Burger, G. J.
, Tiggelaar, R. M.
, Sanders, R. G.
, Gardeniers, H. G.
, & Tas, N. R. (2020).
Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography. In
33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1106-1109). [9056175] (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020). IEEE.
https://doi.org/10.1109/MEMS46641.2020.9056175
Capuano, L.
, Tiggelaar, R. M.
, Berenschot, J. W.
, Gardeniers, J. G. E.
, & Römer, G. R. B. E. (2020).
Fabrication of millimeter-long structures in sapphire using femtosecond infrared laser pulses and selective etching.
Optics and Lasers in Engineering,
133, [106114].
https://doi.org/10.1016/j.optlaseng.2020.106114
Jonker, D.
, Kooijman, L., Pordeli, Y.
, van der Wel, B.
, Berenschot, E.
, Borgelink, B.
, Le-The, H.
, de Boer, M.
, Eijkel, J.
, Hueting, R.
, Tiggelaar, R.
, van Houselt, A.
, Gardeniers, H.
, & Tas, N. (2020).
Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond.
International Journal of Nanotechnology,
17(7-10), 583-606.
https://doi.org/10.1504/IJNT.2020.111322
Ni, S.
, Berenschot, E. J. W.
, Westerik, P. J.
, de Boer, M. J.
, Wolf, R.
, Le-The, H.
, Gardeniers, H. J. G. E.
, & Tas, N. R. (2020).
Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography.
Microsystems and Nanoengineering,
6(1), [25].
https://doi.org/10.1038/s41378-020-0134-6
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Universiteit Twente
Faculty of Science and Technology
Carré
C1405
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