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ing. J.W. Berenschot (Erwin)

Ondersteunend en beheerspersoneel

Expertises

Silicon
Fabrication
Membranes
Etching
Lithography
Masks
Silicon Nitride
Liquids

Publicaties

Recente Artikelen
Le The, H., Berenschot, J. W., Tiggelaar, R. M., Tas, N. R., van den Berg, A., & Eijkel, J. C. T. (2016). Large-area fabrication of sub-30 NM periodic nanostructures. In 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016 (pp. 1124-1125). (International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS); No. --). The Chemical and Biological Microsystems Society.
Sun, X., Veltkamp, H-W., Berenschot, J. W., Gardeniers, J. G. E., & Tas, N. R. (2016). Nano-pyramid arrays for nano-particle trapping. In Nano-pyramid arrays for nano-particle trapping (pp. 185-188). Category numberCFP16MEM-ART; Code 119597. DOI: 10.1109/MEMSYS.2016.7421589
Arik, Y. B., Matsui, R., Sarajlic, E., Takayama, Y., Boom, B. A., Berenschot, J. W., ... Fujita, H. (2016). Ultra-thin nanochannel-based liquid TEM cell for EELS analysis and high resolution imaging. In 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 804-807). IEEE. DOI: 10.1109/MEMSYS.2016.7421751
Berenschot, J. W., Tiggelaar, R. M., Geerlings, J., Gardeniers, J. G. E., Tas, N. R., Malankowska, M., ... Mallada, R. (2016). 3D-fractal engineering based on oxide-only corner lithography. In 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (Category numberCFP16DTI-ART; Code 122735). IEEE. DOI: 10.1109/DTIP.2016.7514895

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Bezoekadres

Universiteit Twente
Faculteit Technische Natuurwetenschappen
Carré (gebouwnr. 15), kamer 1405
Hallenweg 23
7522NH  Enschede

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Postadres

Universiteit Twente
Faculteit Technische Natuurwetenschappen
Carré  1405
Postbus 217
7500 AE Enschede