Welkom...

ing. J.W. Berenschot (Erwin)

Ondersteunend en beheerspersoneel

Expertises

Engineering & Materials Science
Fabrication
Lithography
Silicon
Chemistry
Etching
Physics & Astronomy
Etching
Fabrication
Lithography
Wafers

Publicaties

Recent
Schmitt, T. W., Connolly, M. R., Schleenvoigt, M., Liu, C., Kennedy, O., Chávez-Garcia, J. M., Jalil, A. R., Bennemann, B., Trellenkamp, S., Lentz, F., Neumann, E., Lindström, T., De Graaf, S. E. , Berenschot, E. , Tas, N., Mussler, G., Petersson, K. D., Grützmacher, D., & Schüffelgen, P. (2022). Integration of Topological Insulator Josephson Junctions in Superconducting Qubit Circuits. Nano letters, 22(7), 2595-2602. https://doi.org/10.1021/acs.nanolett.1c04055
Jonker, D. , Berenschot, E. J. W. , Tiggelaar, R. M. , Tas, N. R. , Van Houselt, A. , & Gardeniers, H. J. G. E. (2022). A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon Nanostructures. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 561-564). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE Computer Society. https://doi.org/10.1109/MEMS51670.2022.9699565
Borgelink, B. T. H. , Berenschot, E. J. W. , Sanders, R. G. P. , Schlautmann, S. , Gardeniers, H. , & Tas, N. R. (2022). Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 259-262). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE Computer Society. https://doi.org/10.1109/MEMS51670.2022.9699536
Jonker, D., Jafari, Z., Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2020). Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications. In Novel Optical Materials and Applications, NOMA 2020 (Vol. Part F186-NOMA 2020). [143868] Optical Society of America. https://doi.org/10.1364/NOMA.2020.NoM3C.5
Van Kampen, C. P. , Berenschot, E. J. , Burger, G. J. , Tiggelaar, R. M. , Sanders, R. G. , Gardeniers, H. G. , & Tas, N. R. (2020). Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1106-1109). [9056175] (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020). IEEE. https://doi.org/10.1109/MEMS46641.2020.9056175
Kooijman, L. J., Pordeli, Y. , van der Wel, B. Y. , Berenschot, J. W. , Eijkel, J. C. T. , & Tas, N. R. (2020). High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019 (pp. 1188-1189). The Chemical and Biological Microsystems Society.
Pordeli, Y. , Borgelink, B. T. H. , Van Der Wel, B. Y. , Berenschot, E. J. W. , Dogan, T. , De Boer, M. J. , Bruinink, C. M. , Zandvliet, H. J. W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2019). Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). [8808559] IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808559
Schüffelgen, P., Rosenbach, D. , Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G. , Berenschot, E. , Tas, N., ... Grützmacher, D. (2019). Selective area growth and stencil lithography for in situ fabricated quantum devices. Nature nanotechnology, 14(9), 825-831. https://doi.org/10.1038/s41565-019-0506-y

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Universiteit Twente
Faculty of Science and Technology
Carré (gebouwnr. 15), kamer C1405
Hallenweg 23
7522NH  Enschede

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Universiteit Twente
Faculty of Science and Technology
Carré  C1405
Postbus 217
7500 AE Enschede