ing. J.W. Berenschot (Erwin)

Engineering & Materials Science

# Fabrication
# Lithography
# Silicon

Chemistry

# Etching

Physics & Astronomy

# Etching
# Fabrication
# Lithography
# Wafers

Faculty of Science and Technology (TNW), Mesoscale Chemical Systems (MCS)

Kooijman, L. J., Pordeli, Y. , Berenschot, J. W. , & Tas, N. R. (2023). Lateral Fractal Formation by Crystallographic Silicon Micromachining. Fractal and Fractional, 7(2), [202]. https://doi.org/10.3390/fractalfract7020202

Berenschot, E. J. W., Pordeli, Y. , Kooijman, L. J., Janssens, Y. L. , Tiggelaar, R. M. , & Tas, N. R. (2023). 3d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic Nanolithography. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 (pp. 639-642). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052139

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M., Rodrigo, S. G., Mallada, R. , Tas, N. R., & Pina, M. P. (2023). Retraction Note: Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate. Microchimica acta, 190, [38]. https://doi.org/10.1007/s00604-022-05620-y

Arturo, S. A. , Erwin, B. , Niels, T., & Silke, K. (2022). Fractals in tissue engineering. (Patent No. NL2025961B).

Berenschot, J. W. , Garcia Blanco, S. M. , Martinussen, S. , Tas, N. R. , & Tiggelaar, R. M. (2022). Light source, mems optical switch, sensor and methods for manufacturing the same. (Patent No. WO2022216150).

Susarrey Arce, A., Krol, S. , Berenschot, E. , & Tas, N. (2022). Fractals in tissue engineering. (Patent No. WO2022005280).

Wang, K. , Berenschot, E. J. W. , Dijkstra, M. , Tiggelaar, R. M. , Martinussen, S. M. , Chang, L. , Hendriks, W. A. P. M. , Borgelink, B. T. H. , Frentrop, R. N. , García Blanco, S. M. , Tas, N. R. , & Tkachuk, V. V. (2022). Low-stress Si₃N₄ waveguides on sapphire substrate: (Student paper). In ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano.

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M. , Susarrey Arce, A., Mallada, R., Pina, M. P. , García Blanco, S. M. , & Tas, N. R. (2022). Fabrication and characterization of symmetric Au-nanostructures with SERS activity: (Student paper). In ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano.

Schmitt, T. W., Connolly, M. R., Schleenvoigt, M., Liu, C., Kennedy, O., Chávez-Garcia, J. M., Jalil, A. R., Bennemann, B., Trellenkamp, S., Lentz, F., Neumann, E., Lindström, T., De Graaf, S. E. , Berenschot, E. , Tas, N., Mussler, G., Petersson, K. D., Grützmacher, D., & Schüffelgen, P. (2022). Integration of Topological Insulator Josephson Junctions in Superconducting Qubit Circuits. Nano letters, 22(7), 2595-2602. https://doi.org/10.1021/acs.nanolett.1c04055

Jonker, D. , Berenschot, E. J. W. , Tiggelaar, R. M. , Tas, N. R. , Van Houselt, A. , & Gardeniers, H. J. G. E. (2022). A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon Nanostructures. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 561-564). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699565

Borgelink, B. T. H. , Berenschot, E. J. W. , Sanders, R. G. P. , Schlautmann, S. , Gardeniers, H. , & Tas, N. R. (2022). Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 259-262). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699536

Borgelink, B. T. H. , Berenschot, E. J. W. , Sanders, R. G. P. , Schlautmann, S. , Tas, N. R. , & Gardeniers, H. J. G. E. (2022). Fabrication and characterization of microfluidic pedestal nozzles enabling geometric contact line pinning. Sensors and Actuators B: Chemical, 365, [131943]. https://doi.org/10.1016/j.snb.2022.131943

Jonker, D. , Berenschot, E. J. W. , Tas, N. R. , Tiggelaar, R. M. , van Houselt, A. , & Gardeniers, H. J. G. E. (2022). Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones. Nanoscale research letters, 17(1), [100]. https://doi.org/10.1186/s11671-022-03735-y

Berenschot, E. , Tiggelaar, R. M. , Borgelink, B., Van Kampen, C., Deenen, C. S., Pordeli, Y. , Witteveen, H. , Gardeniers, H. J. G. E. , & Tas, N. R. (2022). Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices. ACS Applied Nano Materials, 5(10), 15847-15854. https://doi.org/10.1021/acsanm.2c04079

Capuano, L. , Berenschot, J. W. , Tiggelaar, R. M. , Feinaeugle, M. , Tas, N. R. , Gardeniers, J. G. E. , & Römer, G. R. B. E. (2022). Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes. Journal of micromechanics and microengineering, 32(12), [125003]. https://doi.org/10.1088/1361-6439/ac9911

Centonze, M. , Berenschot, E. J. W., Serrati, S. , Susarrey-Arce, A., & Krol, S. (2022). The Fast Track for Intestinal Tumor Cell Differentiation and In Vitro Intestinal Models by Inorganic Topographic Surfaces. Pharmaceutics, 14(1), [218]. https://doi.org/10.3390/pharmaceutics14010218

Dituri, F., Centonze, M. , Berenschot, E. J. W. , Tas, N. R. , Susarrey-Arce, A., & Krol, S. (2021). Complex tumor spheroid formation and one‐step cancer‐ associated fibroblasts purification from hepatocellular carcinoma tissue promoted by inorganic surface topography. Nanomaterials, 11(12), [3233]. https://doi.org/10.3390/nano11123233

Jonker, D., Jafari, Z. , Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2021). A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars. Nanoscale Advances, 3(17), 4926-4939. https://doi.org/10.1039/d1na00316j

Seyfert, C. , Berenschot, E. J. W. , Tas, N. R. , Susarrey-Arce, A. , & Marin, A. (2021). Evaporation-driven colloidal cluster assembly using droplets on superhydrophobic fractal-like structures. Soft matter, 17(3), 506-515. https://doi.org/10.1039/D0SM01346C

Jonker, D., Jafari, Z. , Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2020). Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications. In Novel Optical Materials and Applications, NOMA 2020 (Vol. Part F186-NOMA 2020). [143868] Optical Society of America. https://doi.org/10.1364/NOMA.2020.NoM3C.5

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M., Rodrigo, S. G., Mallada, R. , Tas, N. R., & Pina, M. P. (2020). Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate. Microchimica acta, 187(4), [247]. https://doi.org/10.1007/s00604-020-4216-9

Van Kampen, C. P. , Berenschot, E. J. , Burger, G. J. , Tiggelaar, R. M. , Sanders, R. G. , Gardeniers, H. G. , & Tas, N. R. (2020). Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1106-1109). [9056175] (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020). IEEE. https://doi.org/10.1109/MEMS46641.2020.9056175

Capuano, L. , Tiggelaar, R. M. , Berenschot, J. W. , Gardeniers, J. G. E. , & Römer, G. R. B. E. (2020). Fabrication of millimeter-long structures in sapphire using femtosecond infrared laser pulses and selective etching. Optics and Lasers in Engineering, 133, [106114]. https://doi.org/10.1016/j.optlaseng.2020.106114

Jonker, D. , Kooijman, L., Pordeli, Y. , van der Wel, B. , Berenschot, E. , Borgelink, B. , Le-The, H. , de Boer, M. , Eijkel, J. , Hueting, R. , Tiggelaar, R. , van Houselt, A. , Gardeniers, H. , & Tas, N. (2020). Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond. International Journal of Nanotechnology, 17(7-10), 583-606. https://doi.org/10.1504/IJNT.2020.111322

Ni, S. , Berenschot, E. J. W. , Westerik, P. J. , de Boer, M. J. , Wolf, R. , Le-The, H. , Gardeniers, H. J. G. E. , & Tas, N. R. (2020). Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography. Microsystems and Nanoengineering, 6(1), [25]. https://doi.org/10.1038/s41378-020-0134-6

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j.w.berenschot@utwente.nl

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Universiteit Twente
Faculty of Science and Technology
Carré (gebouwnr. 15), kamer C1405
Hallenweg 23
7522NH Enschede

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Universiteit Twente
Faculty of Science and Technology
Carré C1405
Postbus 217
7500 AE Enschede

Faculty of Science and Technology (TNW), Mesoscale Chemical Systems (MCS)

Universiteit Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
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