Expertises
Material Science
- Thin Films
- Transmission Electron Microscopy
- Film
- Ruthenium
- Silicon Nitride
- Heating Load
Engineering
- Emissivity
- Plasma Interaction
Organisaties
Publicaties
2024
TEM observations of plasma - thin film interaction (2024)[Contribution to conference › Poster] MESA+ Day 2024. Gerlach, L., Shafikov, A., Sturm, J. M. & Ackermann, M.
Onderzoeksprofielen
Adres
Universiteit Twente
Carré (gebouwnr. 15), kamer 2031
Hallenweg 23
7522 NH Enschede
Universiteit Twente
Carré 2031
Postbus 217
7500 AE Enschede
Scan de QR-code of