Welkom...

dr. M. Bayraktar (Muharrem)

Universitair docent

Expertises

Physics & Astronomy
Lasers
Lithography
Mirrors
Tin
Ultraviolet Radiation
Wavelengths
Engineering & Materials Science
Computer Generated Holography
Holograms

Publicaties

Recent
Behnke, L., Schupp, R., Bouza, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J., Mazzotta, Z. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of tin plasma driven by high-energy, 2-μm-wavelength light. Poster session presented at EGAS 52.
Behnke, L., Schupp, R., Bouza, Z. , Bayraktar, M., Mazzotta, Z., Meijer, R. A., Sheil, J., Witte, S., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2021). Extreme ultraviolet light from a tin plasma driven by a 2-μm-wavelength laser. Optics express, 29(3), 4475-4487. https://doi.org/10.1364/oe.411539
Schupp, R., Behnke, L., Sheil, J., Bouza, Z. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of 1- and 2−μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light. Physical Review Research, 3(1), [013294]. https://doi.org/10.1103/PhysRevResearch.3.013294
Schupp, R., Behnke, L., Bouza, Z., Mazzotta, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets. Journal of physics D: applied physics, 54(36), [365103]. https://doi.org/10.1088/1361-6463/ac0b70
Bouza, Z. , Byers, J., Scheers, J., Schupp, R., Mostafa, Y., Behnke, L., Mazzotta, Z., Sheil, J., Ubachs, W., Hoekstra, R. , Bayraktar, M., & Versolato, O. O. (2021). The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5-265.5 nm wavelength range. AIP advances, 11(12), [125003]. https://doi.org/10.1063/5.0073839
Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Spectral investigation of tin ions in an electron beam ion trap and laser-produced plasmas in the EUV region. Poster session presented at EGAS 52.
Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). EUV spectroscopy of Sn ions in an electron beam ion trap and laser-produced plasmas. Poster session presented at Physics@Veldhoven 2021, Online Event, Netherlands.
Torretti, F., Sheil, J., Schupp, R., Basko, M. M. , Bayraktar, M., Meijer, R., Witte, S., Ubachs, W., Hoekstra, R., Versolato, O., Neukirch, A., & Colgan, J. (2020). Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography. Nature communications, 11(1), [2334]. https://doi.org/10.1038/s41467-020-15678-y
van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X., de Kruif, R., Davydova, N., Schiffelers, G., Wählish, F. , van Setten, E., Varenkamp, W., Ricken, K., de Winter, L., McNamara, J. , & Bayraktar, M. (2020). Spectral purity performance of high-power EUV systems. In N. M. Felix, & A. Lio (Eds.), Extreme Ultraviolet (EUV) Lithography XI (Vol. 11323). [1132321] (SPIE Conference Proceedings; Vol. 1323). SPIE. https://doi.org/10.1117/12.2551021
van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X. , Bayraktar, M., de Kruif, R., & Davydova, N. (2020). High-power EUV lithography: spectral purity and imaging performance. Journal of micro/nanolithography, MEMS, and MOEMS, 19(3), [033801]. https://doi.org/10.1117/1.JMM.19.3.033801
Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2020). EUV spectroscopy of Sn5+–Sn10+ ions in an electron beam ion trap and laser-produced plasmas. Journal of physics B: atomic, molecular and optical physics, 53(19), [195001]. https://doi.org/10.1088/1361-6455/aba3a8
Versolato, O., Bayerle, A. , Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L., Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., ... Ubachs, W. (2020). Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. In Journal of Physics: Conference Series: Plasmas & Particle acceleration (19 ed., Vol. 1412). (Journal of physics: Conference series). https://doi.org/10.1088/1742-6596/1412/19/192006
Behnke, L., Schupp, R., Bouza, Z., Scheers, J., Sheil, J., Torretti, F. , Bayraktar, M., Shah, C., Crespo Lopez-Urrutia, J. R., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2019). Spectroscopic Measurements of Sn Laser-Produced Plasmas. Poster session presented at EUV Source Workshop 2019, Amsterdam, Netherlands. http://www.euvlitho.com/2019/S84.pdf
Versolato, O., Bayerle, A. , Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L., Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., ... Ubachs, W. (2019). Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. Poster session presented at XXXIst International Conference on Photonic, Electronic, and Atomic Collisions 2019, Deauville, France.
Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Torretti, F. , Bayraktar, M. , Bijkerk, F., Shah, C., Bekker, H., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2019). Spectral investigation of Sn laser-produced plasmas in the extreme ultraviolet range. Poster session presented at 43rd Annual Meeting NNV AMO 2019, Lunteren, Netherlands.
Bouza, Z., Scheers, J., Sheil, J., Schupp, R. , Bayraktar, M. , Bijkerk, F., Shah, C., Bekker, H., Ubachs, W., Hoekstra, R., & Versolato, O. (2019). Spectral Unraveling of EUV Lithography Light Sources. Poster session presented at Joint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas, Trieste, Italy.

Pure Link

Google Scholar Link

Verbonden aan Opleidingen

Bachelor

Vakken Collegejaar  2021/2022

Vakken in het huidig collegejaar worden toegevoegd op het moment dat zij definitief zijn in het Osiris systeem. Daarom kan het zijn dat de lijst nog niet compleet is voor het gehele collegejaar.
 

Vakken Collegejaar  2020/2021

Contactgegevens

Bezoekadres

Universiteit Twente
Faculty of Science and Technology
Carré (gebouwnr. 15), kamer C2021
Hallenweg 23
7522NH  Enschede

Navigeer naar locatie

Postadres

Universiteit Twente
Faculty of Science and Technology
Carré  C2021
Postbus 217
7500 AE Enschede