Expertises
Physics
- Laser
- Light
- Tin
- Piezoelectricity
- Mirrors
- Thin Films
- Utilization
Earth and Planetary Sciences
- Wavelength
Organisaties
Publicaties
Jump to: 2024 | 2023 | 2022 | 2021 | 2020
2024
Spectral and spatial resolution of an extreme ultraviolet broadband imaging spectrometer based on dispersion-matched zone plates (2024)AIP advances, 14(10). Article 105021. Babenko, I., Mostafa, Y., Bouza, Z., Versolato, O. O. & Bayraktar, M.https://doi.org/10.1063/5.0226426
2023
Developments for broadband spectral and spatial characterization of tin plasma light sources for EUV lithography (2023)[Thesis › PhD Thesis - Research external, graduation external]. ProefschriftMaken. Bouza, Z.https://ir.arcnl.nl/pub/351EUV Source Metrology (2023)In Photon Sources for Lithography and Metrology (pp. 509-535). Bayraktar, M., Liu, F., Versolato, O. & Bijkerk, F.https://doi.org/10.1117/3.2638242.ch13Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates (2023)Optics letters, 48(16), 4316-4319. Mostafa, Y., Bouza, Z., Byers, J., Babenko, I., Ubachs, W., Versolato, O. O. & Bayraktar, M.https://doi.org/10.1364/OL.496995Active Wafer Table Based on Piezoelectric Thin Films (2023)[Contribution to conference › Poster] NWO Physics 2023. Şimşek, E., Vries, S. E., Jansen, B., Steur, M., Bijkerk, F., Bayraktar, M. & Ackermann, M.Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables (2023)[Contribution to conference › Poster] MESA+ Meeting 2023. Şimşek, E., Jansen, B., Bayraktar, M. & Ackermann, M.
2022
Influence of the Template Layer on the Structure and Ferroelectric Properties of PbZr<sub>0.52</sub>Ti<sub>0.48</sub>O<sub>3</sub> Films (2022)ACS Omega, 7(26), 22210-22220. Lucke, P., Nematollahi, M., Bayraktar, M., Yakshin, A. E., Elshof, J. E. t. & Bijkerk, F.https://doi.org/10.1021/acsomega.2c00815Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas (2022)In Mid-Infrared Coherent Sources, MICS 2022. Article JW5A.8 (Optics InfoBase Conference Papers). Optica Publishing Group (formerly OSA). Behnke, L., Mostafa, Y. Y., Schupp, R., Bouza, Z., Lassise, A., Bayraktar, M., Sheil, J., Hoekstra, R., Ubachs, W. & Versolato, O. O.Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV (2022)In Compact EUV and X-ray Light Sources, EUVXRAY 2022. Article ETh5A.7 (Optics InfoBase Conference Papers). Optica Publishing Group (formerly OSA). Versolato, O. O., Schupp, R., Behnke, L., Mostafa, Y. Y., Bouza, Z., Lassise, A., Bayraktar, M., Sheil, J., Hoekstra, R. & Ubachs, W.
2021
The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5-265.5 nm wavelength range (2021)AIP advances, 11(12). Article 125003. Bouza, Z., Byers, J., Scheers, J., Schupp, R., Mostafa, Y., Behnke, L., Mazzotta, Z., Sheil, J., Ubachs, W., Hoekstra, R., Bayraktar, M. & Versolato, O. O.https://doi.org/10.1063/5.0073839Describing Hysteresis for Non-Switching Fields in Epitaxial Monoclinic PZT Films Using Polarization Rotation Model (2021)[Contribution to conference › Poster] MRS Fall Meeting 2021. Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M., Bijkerk, F. & Houwman, E. P.Describing hysteresis for non-switching fields in epitaxial monoclinic PZT films using polarization rotation model (2021)[Contribution to conference › Poster] E-MRS Fall Meeting 2021. Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M., Bijkerk, F. & Houwman, E. P.Influence of DC Bias on the Hysteresis, Loss, and Nonlinearity of Epitaxial PbZr0.55 Ti0.45 O3 Films (2021)Advanced electronic materials, 7(8). Article 2100115. Lucke, P., Bayraktar, M., Schukkink, N., Yakshin, A. E., Rijnders, G., Bijkerk, F. & Houwman, E. P.https://doi.org/10.1002/aelm.202100115Characterization of tin plasma driven by high-energy, 2-μm-wavelength light (2021)[Contribution to conference › Poster] 52nd Conference of the European Group on Atomic Systems, EGAS 2021. Behnke, L., Schupp, R., Bouza, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J., Mazzotta, Z., Bayraktar, M., Ubachs, W., Hoekstra, R. & Versolato, O.Spectral investigation of tin ions in an electron beam ion trap and laser-produced plasmas in the EUV region (2021)[Contribution to conference › Poster] 52nd Conference of the European Group on Atomic Systems, EGAS 2021. Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J., Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R. & Versolato, O.Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets (2021)Journal of physics D: applied physics, 54(36). Article 365103. Schupp, R., Behnke, L., Bouza, Z., Mazzotta, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J., Bayraktar, M., Ubachs, W., Hoekstra, R. & Versolato, O.https://doi.org/10.1088/1361-6463/ac0b70Layer Growth And Hysteresis Modelling Of Epitaxial Lead Zirconate Titanate Thin films (2021)[Thesis › PhD Thesis - Research external, graduation UT]. University of Twente. Lucke, P.https://doi.org/10.3990/1.9789036551526Characterization of 1- and 2−μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light (2021)Physical Review Research, 3(1). Article 013294. Schupp, R., Behnke, L., Sheil, J., Bouza, Z., Bayraktar, M., Ubachs, W., Hoekstra, R. & Versolato, O.https://doi.org/10.1103/PhysRevResearch.3.013294Extreme ultraviolet light from a tin plasma driven by a 2-μm-wavelength laser (2021)Optics express, 29(3), 4475-4487. Behnke, L., Schupp, R., Bouza, Z., Bayraktar, M., Mazzotta, Z., Meijer, R. A., Sheil, J., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O.https://doi.org/10.1364/oe.411539Adaptive multilayer mirrors based on piezoelectric actuators (2021)[Contribution to conference › Poster] Physics@Veldhoven 2021. Lucke, P., Polyakov, A. Y., Bayraktar, M., Schukkink, N., Nematollahi, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F.EUV spectroscopy of Sn ions in an electron beam ion trap and laser-produced plasmas (2021)[Contribution to conference › Poster] Physics@Veldhoven 2021. Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J., Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R. & Versolato, O.
2020
Hysteresis, loss and nonlinearity in epitaxial PbZr0.55Ti0.45O3 films: A polarization rotation model (2020)Advanced functional materials, 30(52). Article 2005397. Lucke, P., Bayraktar, M., Birkhölzer, Y. A., Nematollahi, M., Yakshin, A., Rijnders, A. J. H. M., Bijkerk, F. & Houwman, E. P.https://doi.org/10.1002/adfm.202005397Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography (2020)Nature communications, 11(1). Article 2334. Torretti, F., Sheil, J., Schupp, R., Basko, M. M., Bayraktar, M., Meijer, R., Witte, S., Ubachs, W., Hoekstra, R., Versolato, O., Neukirch, A. & Colgan, J.https://doi.org/10.1038/s41467-020-15678-yHigh-power EUV lithography: spectral purity and imaging performance (2020)Journal of micro/nanolithography, MEMS, and MOEMS, 19(3). Article 033801. van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X., Bayraktar, M., de Kruif, R. & Davydova, N.https://doi.org/10.1117/1.JMM.19.3.033801EUV spectroscopy of Sn5+–Sn10+ ions in an electron beam ion trap and laser-produced plasmas (2020)Journal of physics B: atomic, molecular and optical physics, 53(19). Article 195001. Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J., Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R. & Versolato, O. O.https://doi.org/10.1088/1361-6455/aba3a8
Onderzoeksprofielen
Verbonden aan opleidingen
Vakken collegejaar 2024/2025
Vakken in het huidig collegejaar worden toegevoegd op het moment dat zij definitief zijn in het Osiris systeem. Daarom kan het zijn dat de lijst nog niet compleet is voor het gehele collegejaar.
Vakken collegejaar 2023/2024
Adres
Universiteit Twente
Carré (gebouwnr. 15), kamer C2021
Hallenweg 23
7522 NH Enschede
Universiteit Twente
Carré C2021
Postbus 217
7500 AE Enschede
Scan de QR-code of