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dr. M. Bayraktar (Muharrem)

Universitair docent

Expertises

Physics & Astronomy
Lasers
Lithography
Mirrors
Tin
Ultraviolet Radiation
Wavelengths
Engineering & Materials Science
Computer Generated Holography
Holograms

Publicaties

Recent
Şimşek, E., Jansen, B. , Bayraktar, M. , & Ackermann, M. (2023). Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables. Poster session presented at MESA+ Meeting 2023, Enschede, Netherlands.
Şimşek, E., Vries, S. E., Jansen, B., Steur, M. , Bijkerk, F. , Bayraktar, M. , & Ackermann, M. (2023). Active Wafer Table Based on Piezoelectric Thin Films. Poster session presented at NWO Physics 2023, Veldhoven, Netherlands.
Bouza, Z. (2023). Developments for broadband spectral and spatial characterization of tin plasma light sources for EUV lithography. [PhD Thesis - Research external, graduation external, Amsterdam UMC location Vrije Universiteit Amsterdam]. ProefschriftMaken. https://ir.arcnl.nl/pub/351
Mostafa, Y., Bouza, Z., Byers, J., Babenko, I., Ubachs, W., Versolato, O. O. , & Bayraktar, M. (2023). Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates. Optics letters, 48(16), 4316-4319. https://doi.org/10.1364/OL.496995
Bayraktar, M., Liu, F., Versolato, O. , & Bijkerk, F. (2023). EUV Source Metrology. In V. Bakshi (Ed.), Photon Sources for Lithography and Metrology (pp. 509-535) https://doi.org/10.1117/3.2638242.ch13
Behnke, L., Mostafa, Y. Y., Schupp, R., Bouza, Z., Lassise, A. , Bayraktar, M., Sheil, J., Hoekstra, R., Ubachs, W., & Versolato, O. O. (2022). Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas. In Mid-Infrared Coherent Sources, MICS 2022 Article JW5A.8 (Optics InfoBase Conference Papers). Optica Publishing Group.
Versolato, O. O., Schupp, R., Behnke, L., Mostafa, Y. Y., Bouza, Z., Lassise, A. , Bayraktar, M., Sheil, J., Hoekstra, R., & Ubachs, W. (2022). Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV. In Compact EUV and X-ray Light Sources, EUVXRAY 2022 Article ETh5A.7 (Optics InfoBase Conference Papers). Optica Publishing Group.
Behnke, L., Schupp, R., Bouza, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J., Mazzotta, Z. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of tin plasma driven by high-energy, 2-μm-wavelength light. Poster session presented at EGAS 52.
Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Spectral investigation of tin ions in an electron beam ion trap and laser-produced plasmas in the EUV region. Poster session presented at EGAS 52.
Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). EUV spectroscopy of Sn ions in an electron beam ion trap and laser-produced plasmas. Poster session presented at Physics@Veldhoven 2021, Online Event, Netherlands.
Bouza, Z., Byers, J., Scheers, J., Schupp, R., Mostafa, Y., Behnke, L., Mazzotta, Z., Sheil, J., Ubachs, W., Hoekstra, R. , Bayraktar, M., & Versolato, O. O. (2021). The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5-265.5 nm wavelength range. AIP advances, 11(12), Article 125003. https://doi.org/10.1063/5.0073839
Schupp, R., Behnke, L., Bouza, Z., Mazzotta, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets. Journal of physics D: applied physics, 54(36), Article 365103. https://doi.org/10.1088/1361-6463/ac0b70
Schupp, R., Behnke, L., Sheil, J., Bouza, Z. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of 1- and 2−μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light. Physical Review Research, 3(1), Article 013294. https://doi.org/10.1103/PhysRevResearch.3.013294
Lucke, P. (2021). Layer Growth And Hysteresis Modelling Of Epitaxial Lead Zirconate Titanate Thin films. [PhD Thesis - Research external, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036551526
Behnke, L., Schupp, R., Bouza, Z. , Bayraktar, M., Mazzotta, Z., Meijer, R. A., Sheil, J., Witte, S., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2021). Extreme ultraviolet light from a tin plasma driven by a 2-μm-wavelength laser. Optics express, 29(3), 4475-4487. https://doi.org/10.1364/oe.411539
Versolato, O., Bayerle, A. , Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L. , Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., ... Ubachs, W. (2020). Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. In Journal of Physics: Conference Series: Plasmas & Particle acceleration (19 ed., Vol. 1412). (Journal of physics: Conference series). https://doi.org/10.1088/1742-6596/1412/19/192006
Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2020). EUV spectroscopy of Sn5+–Sn10+ ions in an electron beam ion trap and laser-produced plasmas. Journal of physics B: atomic, molecular and optical physics, 53(19), Article 195001. https://doi.org/10.1088/1361-6455/aba3a8
van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X. , Bayraktar, M., de Kruif, R., & Davydova, N. (2020). High-power EUV lithography: spectral purity and imaging performance. Journal of micro/nanolithography, MEMS, and MOEMS, 19(3), Article 033801. https://doi.org/10.1117/1.JMM.19.3.033801
van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X., de Kruif, R., Davydova, N., Schiffelers, G., Wählish, F. , van Setten, E., Varenkamp, W., Ricken, K., de Winter, L., McNamara, J. , & Bayraktar, M. (2020). Spectral purity performance of high-power EUV systems. In N. M. Felix, & A. Lio (Eds.), Extreme Ultraviolet (EUV) Lithography XI (Vol. 11323). Article 1132321 (SPIE Conference Proceedings; Vol. 1323). SPIE. https://doi.org/10.1117/12.2551021

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Vakken Collegejaar  2023/2024

Vakken in het huidig collegejaar worden toegevoegd op het moment dat zij definitief zijn in het Osiris systeem. Daarom kan het zijn dat de lijst nog niet compleet is voor het gehele collegejaar.
 

Vakken Collegejaar  2022/2023

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Bezoekadres

Universiteit Twente
Faculty of Science and Technology
Carré (gebouwnr. 15), kamer C2021
Hallenweg 21
7522NH  Enschede

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Postadres

Universiteit Twente
Faculty of Science and Technology
Carré  C2021
Postbus 217
7500 AE Enschede