M.J. de Boer (Meint) | Universiteit Twente

Engineering & Materials Science

# Fabrication
# Lithography
# Microfluidics
# Silicon

Chemistry

# Etching

Physics & Astronomy

# Fabrication
# Microelectromechanical Systems
# Silicon

Goodwin, M. J. , Harteveld, C. A. M. , de Boer, M. J. , & Vos, W. L. (2023). Deep reactive ion etching of cylindrical nanopores in silicon for photonic crystals. Nanotechnology, 34(22), Article 225301. Advance online publication. https://doi.org/10.1088/1361-6528/acc034

Veltkamp, H-W., Janssens, Y. L. , de Boer, M. J. , Zhao, Y. , Wiegerink, R. J. , Tas, N. R. , & Lötters, J. C. (2022). Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD. Micromachines, 13(11), Article 1908. https://doi.org/10.3390/mi13111908

Yariesbouei, M. , Sparreboom, W. , Groenesteijn, J. , van Putten, J. H. , de Boer, M. J. , Wiegerink, R. J. , Veltkamp, H-W., Yu, Q., Rodriguez Olguin, M. A. , & Lötters, J. C. (2021). Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No. WO2021054829). https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829

Zhao, Y., Janssens, Y. L. , Veltkamp, H. W. , de Boer, M. J. , Groenesteijn, J. , Tas, N. R. , Wiegerink, R. J. , & Lötters, J. C. (2021). Sacrificial grid release technology: A versatile release concept for MEMS structures. Journal of micromechanics and microengineering, 31(4), Article 045013. https://doi.org/10.1088/1361-6439/abe7da

Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J. , Ma, K., Leussink, P. , de Boer, M., & Jansen, H. (2020). The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF₆/O₂ cycles with excellent 3D profile control at room temperature. ECS journal of solid state science and technology, 9(2), Article 024002. https://doi.org/10.1149/2162-8777/ab61ed

Zhang, Z., Martinsen, T., Liu, G., Tayyib, M., Cui, D. , de Boer, M. J., Karlsen, F., Jakobsen, H., Xue, C., & Wang, K. (2020). Ultralow Broadband Reflectivity in Black Silicon via Synergy between Hierarchical Texture and Specific-Size Au Nanoparticles. Advanced Optical Materials, 8(19), Article 2000668. https://doi.org/10.1002/adom.202000668

Zhao, Y. , Veltkamp, H-W., Schut, T. V. P. , Sanders, R. G. P., Breazu, B. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2020). Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology. Micromachines, 11(6), Article 561. https://doi.org/10.3390/MI11060561

Droogendijk, H. , Boer, M. J. D. , Sanders, R. G. P. , & Krijnen, G. J. M. (2020). Correction to ‘A biomimetic accelerometer inspired by the cricket's clavate hair’. Journal of The Royal Society Interface, 17(172), Article 20200890. https://doi.org/10.1098/rsif.2020.0890

Jonker, D. , Kooijman, L., Pordeli, Y. , van der Wel, B. , Berenschot, E. , Borgelink, B. , Le-The, H. , de Boer, M. , Eijkel, J. , Hueting, R. , Tiggelaar, R. , van Houselt, A. , Gardeniers, H. , & Tas, N. (2020). Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond. International Journal of Nanotechnology, 17(7-10), 583-606. https://doi.org/10.1504/IJNT.2020.111322

Ni, S. , Berenschot, E. J. W. , Westerik, P. J. , de Boer, M. J. , Wolf, R. , Le-The, H. , Gardeniers, H. J. G. E. , & Tas, N. R. (2020). Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography. Microsystems and Nanoengineering, 6(1), Article 25. https://doi.org/10.1038/s41378-020-0134-6

Pordeli, Y. , Borgelink, B. T. H. , van der Wel, B. Y. , Berenschot, E. J. W. , Dogan, T. , de Boer, M. J. , Bruinink, C. M. , Zandvliet, H. J. W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2019). Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). Article 8808559 IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808559

Veltkamp, H. W. , Zhao, Y. , De Boer, M. J. , Sanders, R. G. P. , Wiegerink, R. J. , & Lotters, J. C. (2019). High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 648-651). Article 8870667 IEEE. https://doi.org/10.1109/MEMSYS.2019.8870667

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?. 30-31. Abstract from Combura Symposium 2019, Soesterberg, Netherlands.

Zhao, Y. , Veltkamp, H-W., Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 116-119. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Yu, Q. , Veltkamp, H-W. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. 103-105. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Zhao, Y. , Veltkamp, H-W., Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). A short post-processing method for high aspect ratio trenches after Bosch etching. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.

Thannhauser, J., Nas, J., van Grunsven, P. M. , Meinsma, G. , Zwart, H. J. , de Boer, M. J., van Royen, N., Bonnes, J. L., & Brouwer, M. A. (2019). The ventricular fibrillation waveform in relation to shock success in early vs. late phases of out-of-hospital resuscitation. Resuscitation, 139, 99-105. Advance online publication. https://doi.org/10.1016/j.resuscitation.2019.04.010

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology. In 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 32, pp. 648-651). IEEE.

Zhao, Y. , Veltkamp, H-W. , de Boer, M. J. , Zeng, Y. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10). University of Twente.

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Trench-assisted surface channel technology (TASCT) as platform for high-temperature physical parameter sensing. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 9). University of Twente.

Naar mijn profiel

+31534891050 (bij geen gehoor)

m.j.deboer@utwente.nl

www.utwente.nl/mesaplus/nanolab/

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Universiteit Twente
Drienerlolaan 5
7522 NB Enschede

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