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M.J. de Boer (Meint)

Process Technologist

Expertises

Engineering & Materials Science
Fabrication
Lithography
Microfluidics
Silicon
Chemistry
Etching
Physics & Astronomy
Fabrication
Microelectromechanical Systems
Silicon

Publicaties

Recent
Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J. , Ma, K., Leussink, P. , de Boer, M., & Jansen, H. (2020). The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF6/O2 cycles with excellent 3D profile control at room temperature. ECS journal of solid state science and technology, 9(2), [024002]. https://doi.org/10.1149/2162-8777/ab61ed
Zhang, Z., Martinsen, T., Liu, G., Tayyib, M., Cui, D. , de Boer, M. J., Karlsen, F., Jakobsen, H., Xue, C., & Wang, K. (2020). Ultralow Broadband Reflectivity in Black Silicon via Synergy between Hierarchical Texture and Specific-Size Au Nanoparticles. Advanced Optical Materials, 8(19), [2000668]. https://doi.org/10.1002/adom.202000668
Pordeli, Y. , Borgelink, B. T. H. , Van Der Wel, B. Y. , Berenschot, E. J. W. , Dogan, T. , De Boer, M. J. , Bruinink, C. M. , Zandvliet, H. J. W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2019). Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). [8808559] IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808559
Yu, Q. , Veltkamp, H-W. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. 103-105. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Zhao, Y. , Veltkamp, H-W. , Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.
Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). A short post-processing method for high aspect ratio trenches after Bosch etching. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.
Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2017). Selective SiO2 etching in three dimensional structures using parylene-C as mask. 380. Abstract from 43rd International Conference on Micro and Nanoengineering, Braga, Portugal.
Hulshof, F. F. B. , Papenburg, B., Vasilevich, A., Hulsman, M. , Zhao, Y. , Levers, M., Fekete, N. , de Boer, M. , Yuan, H., Singh, S. , Beijer, N., Bray, M-A., Logan, D. J., Reinders, M. J. T., Carpenter, A. E. , van Blitterswijk, C. , Stamatialis, D. , & de Boer, J. (2017). Mining for osteogenic surface topographies: In silico design to in vivo osseo-integration. Biomaterials, 137, 49-60. https://doi.org/10.1016/j.biomaterials.2017.05.020

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Contactgegevens

Bezoekadres

Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab (gebouwnr. 16), kamer 1003
Hallenweg 23
7522NH  Enschede

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Postadres

Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab  1003
Postbus 217
7500 AE Enschede