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# Fabrication
# Lithography
# Microfluidics
# Silicon
Chemistry
# Etching
Physics & Astronomy
# Fabrication
# Microelectromechanical Systems
# Silicon
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Publicaties
Recent
Veltkamp, H. W., Janssens, Y. L.
, de Boer, M. J.
, Zhao, Y.
, Wiegerink, R. J.
, Tas, N. R.
, & Lötters, J. C. (2022).
Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD.
Micromachines,
13(11), [1908].
https://doi.org/10.3390/mi13111908
Yariesbouei, M.
, Sparreboom, W.
, Groenesteijn, J.
, van Putten, J. H.
, de Boer, M. J.
, Wiegerink, R. J.
, Veltkamp, H-W., Yu, Q., Rodriguez Olguin, M. A.
, & Lötters, J. C. (2021).
Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No.
WO2021054829).
https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829
Zhao, Y., Janssens, Y. L.
, Veltkamp, H. W.
, De Boer, M. J.
, Groenesteijn, J.
, Tas, N. R.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Sacrificial grid release technology: A versatile release concept for MEMS structures.
Journal of micromechanics and microengineering,
31(4), [045013].
https://doi.org/10.1088/1361-6439/abe7da
Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J.
, Ma, K., Leussink, P.
, de Boer, M., & Jansen, H. (2020).
The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF6/O2 cycles with excellent 3D profile control at room temperature.
ECS journal of solid state science and technology,
9(2), [024002].
https://doi.org/10.1149/2162-8777/ab61ed
Zhang, Z., Martinsen, T., Liu, G., Tayyib, M., Cui, D.
, de Boer, M. J., Karlsen, F., Jakobsen, H., Xue, C., & Wang, K. (2020).
Ultralow Broadband Reflectivity in Black Silicon via Synergy between Hierarchical Texture and Specific-Size Au Nanoparticles.
Advanced Optical Materials,
8(19), [2000668].
https://doi.org/10.1002/adom.202000668
Zhao, Y.
, Veltkamp, H. W., Schut, T. V. P.
, Sanders, R. G. P., Breazu, B.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2020).
Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology.
Micromachines,
11(6), [561].
https://doi.org/10.3390/MI11060561
Droogendijk, H.
, Boer, M. J. D.
, Sanders, R. G. P.
, & Krijnen, G. J. M. (2020).
Correction to ‘A biomimetic accelerometer inspired by the cricket's clavate hair’.
Journal of The Royal Society Interface,
17(172), [20200890].
https://doi.org/10.1098/rsif.2020.0890
Jonker, D.
, Kooijman, L., Pordeli, Y.
, van der Wel, B.
, Berenschot, E.
, Borgelink, B.
, Le-The, H.
, de Boer, M.
, Eijkel, J.
, Hueting, R.
, Tiggelaar, R.
, van Houselt, A.
, Gardeniers, H.
, & Tas, N. (2020).
Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond.
International Journal of Nanotechnology,
17(7-10), 583-606.
https://doi.org/10.1504/IJNT.2020.111322
Ni, S.
, Berenschot, E. J. W.
, Westerik, P. J.
, de Boer, M. J.
, Wolf, R.
, Le-The, H.
, Gardeniers, H. J. G. E.
, & Tas, N. R. (2020).
Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography.
Microsystems and Nanoengineering,
6(1), [25].
https://doi.org/10.1038/s41378-020-0134-6
Pordeli, Y.
, Borgelink, B. T. H.
, Van Der Wel, B. Y.
, Berenschot, E. J. W.
, Dogan, T.
, De Boer, M. J.
, Bruinink, C. M.
, Zandvliet, H. J. W.
, Gardeniers, H. J. G. E.
, & Tas, N. R. (2019).
Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). [8808559] IEEE.
https://doi.org/10.1109/TRANSDUCERS.2019.8808559
Veltkamp, H. W.
, Zhao, Y.
, De Boer, M. J.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lotters, J. C. (2019).
High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology. In
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 648-651). [8870667] IEEE.
https://doi.org/10.1109/MEMSYS.2019.8870667
Veltkamp, H-W.
, Zhao, Y.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?. 30-31. Abstract from Combura Symposium 2019, Soesterberg, Netherlands.
Zhao, Y.
, Veltkamp, H-W., Schut, T. V. P.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 116-119. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Yu, Q.
, Veltkamp, H-W.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. 103-105. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Zhao, Y.
, Veltkamp, H-W., Schut, T. V. P.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.
Veltkamp, H-W.
, Zhao, Y.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
A short post-processing method for high aspect ratio trenches after Bosch etching. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.
Thannhauser, J., Nas, J., van Grunsven, P. M.
, Meinsma, G.
, Zwart, H. J.
, de Boer, M. J., van Royen, N., Bonnes, J. L., & Brouwer, M. A. (2019).
The ventricular fibrillation waveform in relation to shock success in early vs. late phases of out-of-hospital resuscitation.
Resuscitation,
139, 99-105.
https://doi.org/10.1016/j.resuscitation.2019.04.010
Veltkamp, H-W.
, Zhao, Y.
, de Boer, M. J.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2019).
High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology. In
2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 32, pp. 648-651). IEEE.
Zhao, Y.
, Veltkamp, H-W.
, de Boer, M. J.
, Zeng, Y.
, Groenesteijn, J.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In
Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10). University of Twente.
Veltkamp, H-W.
, Zhao, Y.
, de Boer, M. J.
, Groenesteijn, J.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Trench-assisted surface channel technology (TASCT) as platform for high-temperature physical parameter sensing. In
Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 9). University of Twente.
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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
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Hallenweg 23
7522NH Enschede
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Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab
1003
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7500 AE Enschede