Expertises
Engineering
- Microchannel
- Conductivity Sensor
- Side Wall
- Thermal Conductivity
- Sensor
- Flow Sensor
- Full Scale
- Using Sensor
Organisaties
Publicaties
2025
Inline Microfluidic Thermal Conductivity Sensor Using a Suspended Highly-Doped Silicon Heater (2025)Journal of micromechanics and microengineering, 35(8). Article 085017. Bonnema, M. J. S., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/adfa2eMicrofluidic Thermal Flow Sensor with Extended Linear Range and Reduced Heat Dissipation Using a Shunt (2025)In 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (pp. 586-589). Article 11109290. IEEE Advancing Technology for Humanity. Bonnema, M. J. S., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/Transducers61432.2025.11109290Inline Microfluidic Thermal Conductivity Sensor Using A Suspended Silicon Heater (2025)In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 169-172). IEEE. Bonnema, M. J. S., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/MEMS61431.2025.10917777
2024
Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching (2024)Sensors (Switzerland), 24(24). Article 7952. Yu, Q., Bonnema, M. J. S., Yariesbouei, M., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/s24247952Flow-through Microfluidic Relative Permittivity Sensor Using Highly-Doped Silicon Sidewall Electrodes (2024)Journal of micromechanics and microengineering, 34(11). Article 115002. Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad7ec6Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes (2024)In 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808). Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/mems58180.2024.10439445Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters (2024)In The 5th Conference on MicroFluidic Handling Systems (pp. 53-56). Bonnema, M. J. S., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.
Onderzoeksprofielen
Adres

Universiteit Twente
Carré (gebouwnr. 15), kamer C1528
Hallenweg 23
7522 NH Enschede
Universiteit Twente
Carré C1528
Postbus 217
7500 AE Enschede