Carré

ir. M.J.S. Bonnema (Maarten)

Promovendus
EEMCS-EE-IDS
Carré C1528
m.j.s.bonnema@utwente.nl
+31534894274
Visitekaartje

Expertises

  • Engineering

    • Flow Sensor
    • Side Wall
    • Microchannel
    • Thermal Conductivity
    • Conductivity Sensor
    • Nitrogen

  • Material Science

    • Silicon
    • Permittivity

Organisaties

Publicaties

2026

Simultaneous measurement of flow and volumetric heat capacity using a microfluidic sensor (2026)Sensors and Actuators A: Physical, 409. Article 118110 (E-pub ahead of print/First online). Bonnema, M. J. S., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1016/j.sna.2026.118110Microfluidic thermal flow sensor with extended range via silicon sidewall heaters and a thermal shunt (2026)Sensors and Actuators A: Physical, 404. Article 117770 (E-pub ahead of print/First online). Bonnema, M. J. S., Winnen, V., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1016/j.sna.2026.117770Self-Aligned Sidewall Heaters Applied in a Microfluidic Thermal Flow Sensor (2026)In 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 139-142). Article 11419397. IEEE Advancing Technology for Humanity. Bonnema, M. J. S., Džemaili, N., Veltkamp, H.-W., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/MEMS64181.2026.11419397

2025

Inline Microfluidic Thermal Conductivity Sensor Using a Suspended Highly-Doped Silicon Heater (2025)Journal of micromechanics and microengineering, 35(8). Article 085017. Bonnema, M. J. S., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/adfa2eMicrofluidic Thermal Flow Sensor with Extended Linear Range and Reduced Heat Dissipation Using a Shunt (2025)In 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (pp. 586-589). Article 11109290. IEEE Advancing Technology for Humanity. Bonnema, M. J. S., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/Transducers61432.2025.11109290Inline Microfluidic Thermal Conductivity Sensor Using A Suspended Silicon Heater (2025)In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 169-172). IEEE. Bonnema, M. J. S., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/MEMS61431.2025.10917777

2024

Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching (2024)Sensors (Switzerland), 24(24). Article 7952. Yu, Q., Bonnema, M. J. S., Yariesbouei, M., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/s24247952Flow-through Microfluidic Relative Permittivity Sensor Using Highly-Doped Silicon Sidewall Electrodes (2024)Journal of micromechanics and microengineering, 34(11). Article 115002. Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad7ec6Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes (2024)In 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808). Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/mems58180.2024.10439445Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters (2024)In The 5th Conference on MicroFluidic Handling Systems (pp. 53-56). Bonnema, M. J. S., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.

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