Expertises
Engineering
- Side Wall
- Sensor
- Microchannel
- Microfluidics
- Relative Permittivity
- Using Sensor
Chemical Engineering
- Microfabrication
- Silicon
Organisaties
Publicaties
2024
Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching (2024)Sensors (Switzerland), 24(24). Article 7952. Yu, Q., Bonnema, M., Yariesbouei, M., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/s24247952Flow-through Microfluidic Relative Permittivity Sensor Using Highly-Doped Silicon Sidewall Electrodes (2024)Journal of micromechanics and microengineering, 34(11). Article 115002. Bonnema, M., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad7ec6Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes (2024)In 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808). Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/mems58180.2024.10439445Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters (2024)In The 5th Conference on MicroFluidic Handling Systems (pp. 53-56). Bonnema, M. J. S., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.
Onderzoeksprofielen
Adres
Universiteit Twente
Carré (gebouwnr. 15), kamer C1528
Hallenweg 23
7522 NH Enschede
Universiteit Twente
Carré C1528
Postbus 217
7500 AE Enschede
Scan de QR-code of