Publicaties
Recent
Bonnema, M. J. S.
, Veltkamp, H.-W.
, Wiegerink, R. J.
, & Lötters, J. C. (2024).
Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters. In
The 5th Conference on MicroFluidic Handling Systems (pp. 53-56).
Bonnema, M. J. S.
, Veltkamp, H.-W.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2024).
Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes. In
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808).
https://doi.org/10.1109/mems58180.2024.10439445
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Contactgegevens
Bezoekadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(gebouwnr. 15), kamer C1528
Hallenweg 21
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C1528
Postbus 217
7500 AE Enschede