Expertises
Physics & Astronomy
# Chips
# Mass Flow
# Sensors
Engineering & Materials Science
# Fabrication
# Mems
# Microfluidics
# Sensors
# Silicon
Verbonden aan
Publicaties
Recent
Zeng, Y. (2022).
Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. University of Twente.
https://doi.org/10.3990/1.9789036553636
Yariesbouei, M.
, Sanders, R. G. P.
, Moazzenzade, T.
, Wiegerink, R. J.
, & Lötters, J. C. (2022).
Free Suspended Thin-Walled Nickel Electroplated Tubes for Microfluidic Density and Mass Flow Sensors.
Journal of microelectromechanical systems.
https://doi.org/10.1109/JMEMS.2022.3149632
Alveringh, D.
, van der Ven, D. L.
, Veltkamp, H-W.
, Batenburg, K. M.
, Sanders, R. G. P.
, Fernandez Rivas, D.
, & Wiegerink, R. J. (2022).
Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout. In
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE.
https://doi.org/10.1109/MEMS51670.2022.9699639
Yariesbouei, M.
, Sparreboom, W.
, Groenesteijn, J.
, van Putten, J. H.
, de Boer, M. J.
, Wiegerink, R. J.
, Veltkamp, H-W.
, Yu, Q.
, Rodriguez Olguin, M. A.
, & Lötters, J. C. (2021).
Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No.
WO2021054829).
https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829
De Oliveira, A. C.
, Groenesteijn, J.
, Wiegerink, R. J., & Makinwa, K. A. A. (2021).
5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. In
2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers (pp. 84-86). [9365946] (IEEE International Solid-State Circuits Conference (ISSCC); Vol. 2021). IEEE.
https://doi.org/10.1109/ISSCC42613.2021.9365946
Zhao, Y.
, Janssens, Y. L.
, Veltkamp, H. W.
, De Boer, M. J.
, Groenesteijn, J.
, Tas, N. R.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Sacrificial grid release technology: A versatile release concept for MEMS structures.
Journal of micromechanics and microengineering,
31(4), [045013].
https://doi.org/10.1088/1361-6439/abe7da
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators.
Journal of microelectromechanical systems,
30(6), 885-896.
https://doi.org/10.1109/JMEMS.2021.3107744
Schut, T. V. P. (2021).
Towards a thermal noise limited micro-coriolis mass flow sensor. University of Twente.
https://doi.org/10.3990/1.9789083180410
Yariesbouei, M.
, Wiegerink, R. J.
, Sanders, R. G. P.
, & Lötters, J. C. (2021).
Thin-Walled Cylindrical Nickel Electroplated Tubes for Application in Microfluidic Density and Mass Flow Sensors. In
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems, MEMS (pp. 685-688). [9375238] (IEEE International Conference on Micro Electro Mechanical Systems, MEMS; Vol. 2021). IEEE.
https://doi.org/10.1109/MEMS51782.2021.9375238
Schut, T. V. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
μ-Coriolis Mass Flow Sensor With Differential Capacitive Readout.
IEEE sensors journal,
21(5), 5886-5894. [9277606].
https://doi.org/10.1109/JSEN.2020.3042078
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Vakken Collegejaar 2021/2022
Vakken in het huidig collegejaar worden toegevoegd op het moment dat zij definitief zijn in het Osiris systeem. Daarom kan het zijn dat de lijst nog niet compleet is voor het gehele collegejaar.
Vakken Collegejaar 2020/2021
Contactgegevens
Bezoekadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(gebouwnr. 15), kamer C1409
Hallenweg 23
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C1409
Postbus 217
7500 AE Enschede