Welkom...

dr.ir. R.W.E. van de Kruijs (Robbert)

Universitair docent

Expertises

X Rays
Reflectance
Mirrors
Thin Films
Wavelengths
Laminates
Retarding
Multilayers

Publicaties

Recent
Makhotkin, I. A., Sobierajski, R., Chalupský, J., Tiedtke, K., de Vries, G., Störmer, M., ... Enkisch, H. (2018). Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold. Journal of synchrotron radiation, 25(1), 77-84. DOI: 10.1107/S1600577517017362
Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., ... Enkisch, H. (2018). Experimental study of EUV-mirror radiation damage resistance under long term FEL exposures below the single shot damage threshold. Journal of synchrotron radiation, 25(1), 77-84. DOI: 10.1107/S1600577517017362
Philipsen, V., Luong, K. V., Souriau, L., Erdmann, A., Xu, D., Evanschitzky, P., ... Hendrickx, E. (2017). Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers. Journal of micro/nanolithography, MEMS, and MOEMS, 16(4), [041002]. DOI: 10.1117/1.JMM.16.4.041002
van Zwol, P. J., Nasalevich, M., Voorthuijzen, W. P., Kurganova, E., Notenboom, A., Vles, D. F., ... Zande, W. J. (2017). Pellicle films supporting the ramp to HVM with EUV. In Photomask Technology 2017 (Vol. 10451). [104510O] SPIE. DOI: 10.1117/12.2280560

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Contactgegevens

Bezoekadres

Universiteit Twente
Faculteit Technische Natuurwetenschappen
Carré (gebouwnr. 15), kamer 2017
Hallenweg 23
7522NH  Enschede

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Postadres

Universiteit Twente
Faculteit Technische Natuurwetenschappen
Carré  2017
Postbus 217
7500 AE Enschede