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Makhotkin, I. A., Sobierajski, R., Chalupský, J., Tiedtke, K., de Vries, G., Störmer, M., ... Enkisch, H. (2018). Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold. Journal of synchrotron radiation, 25(1), 77-84. DOI: 10.1107/S1600577517017362
Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., ... Enkisch, H. (2018). Experimental study of EUV-mirror radiation damage resistance under long term FEL exposures below the single shot damage threshold. Journal of synchrotron radiation, 25(1), 77-84. DOI: 10.1107/S1600577517017362
Nikolaev, K., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., & Bijkerk, F. (2017). Crystal surface characterization.
Sturm, J. M., Coloma Ribera, R., van de Kruijs, R. W. E., Yakshin, A., & Bijkerk, F. (2017). In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering. In In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering
Philipsen, V., Luong, K. V., Souriau, L., Hendrickx, E., Erdmann, A., Xu, D., ... Reuter, C. (2017). Reducing EUV mask 3D effects by alternative metal absorbers. In Extreme Ultraviolet (EUV) Lithography VIII (Vol. 10143). [1014310] SPIE. DOI: 10.1117/12.2257929
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Universiteit Twente
Faculteit Technische Natuurwetenschappen
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Universiteit Twente
Faculteit Technische Natuurwetenschappen
Carré
2017
Postbus 217
7500 AE Enschede