Expertises
Engineering & Materials Science
# Gas Permeability
# Lithography
# Plasma Etching
# Porous Silicon
# Silicon Nitride
Physics & Astronomy
# High Aspect Ratio
# Plasma Etching
# Porous Silicon
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Publicaties
Recent
Ni, S.
, Berenschot, E. J. W.
, Westerik, P. J.
, de Boer, M. J.
, Wolf, R.
, Le-The, H.
, Gardeniers, H. J. G. E.
, & Tas, N. R. (2020).
Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography.
Microsystems and Nanoengineering,
6(1), [25].
https://doi.org/10.1038/s41378-020-0134-6
Yu, F., Xie, H., Bai, Y., Xu, F., Han, P., Tian, L.
, & Ni, S. (2018).
Synthesis of porous silicon nitride with unidirectionally aligned channels using extrusion method.
Ceramics - Silikaty,
62(3), 248-252.
https://doi.org/10.13168/cs.2018.0018
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Universiteit Twente
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Carré
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