Carré

W. Wu (Weihua)

Onderzoeker
TNW-ANP-IOS
Carré C4615
w.wu@utwente.nl
Visitekaartje

Expertises

  • Material Science

    • Hydrogen
    • Aluminum Oxide
    • Yttrium Oxide
    • Film Thickness
    • Yttrium
    • Film
    • Chemical Vapor Deposition
    • Silicon

Organisaties

Publicaties

2026

Film Thickness Nonuniformity and the Crucial Role of Water Dosage for Atomic Layer Deposition of Yttrium Oxide (2026)Physica status solidi A, 223(16). Article e70456. Wu, W., van de Kruijs, R. W. E., Gravesteijn, D. J., Houweling, Z. S., Colombi, G. & Kovalgin, A. Y.https://doi.org/10.1002/pssa.70456Hydrogen Radical Permeation Dynamics through Ultrathin ALD Al2O3 Layers Revealed by In Situ Ellipsometry (2026)The Journal of physical chemistry C, 130(23), 8035-8045. Wu, W., van de Kruijs, R. W. E., Gravesteijn, D. J., Houweling, Z. S., Colombi, G. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.6c00522Sensing of Hydrogen Diffusion through Protective Caps: An Ellipsometric Approach to Estimate Hydrogen Content in Pd/Hf Stacks with an Al2O3Cap (2026)The Journal of physical chemistry C, 130(7), 2591-2604. Wu, W., van de Kruijs, R. W. E., Gravesteijn, D. J., Houweling, Z. S., Colombi, G. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.5c06383Improving hydrogen barrier performance of ultrathin Y2O3 by a discontinuous Al2O3 overlayer (2026)[Contribution to conference › Poster] NWO Physics 2026. Wu, W., van de Kruijs, R. W. E. & Kovalgin, A. Y.Realization of Pure Boron/Si Diodes Through a Two-Step Low-Temperature Growth in a Home-Built LP CVD System (2026)Journal of the Electron Devices Society, 14, 176-185. Vu, T. T. H., Batenburg, K. M., Aarnink, A. A. I., Wu, W., Kovalgin, A. Y., Gravesteijn, D. J. & Hueting, R. J. E.https://doi.org/10.1109/JEDS.2026.3667184

2025

Film thickness non-uniformity and crucial role of water dosage for atomic layer deposition of yttrium oxide from yttrium cyclopentadienyl precursor (2025)[Contribution to conference › Poster] 24th EUROCVD & ALD 2025. Wu, W., van de Kruijs, R. W. E. & Kovalgin, A. Y.

Onderzoeksprofielen

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