Expertises
Physics & Astronomy
# Actuation
# Mass Flow
# Piezoelectric Transducers
# Sensors
# Silicon Nitrides
Earth & Environmental Sciences
# Fuel Gas
Engineering & Materials Science
# Gas Fuels
# Lead Zirconate Titanate
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Publicaties
Recent
Zeng, Y.
, Wiegerink, R. J.
, & Lötters, J. C. (2022).
Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout. In
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 59-62). (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022, No. 35). IEEE.
https://doi.org/10.1109/MEMS51670.2022.9699578
Zeng, Y.
, Sanders, R.
, Wiegerink, R. J.
, & Lötters, J. C. (2022).
Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor.
Sensors,
22(2), Article 673.
https://doi.org/10.3390/s22020673
Zeng, Y. (2022).
Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036553636
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators.
Journal of microelectromechanical systems,
30(6), 885-896.
https://doi.org/10.1109/JMEMS.2021.3107744
Zeng, Y.
, Sanders, R.
, Wiegerink, R.
, & Lötters, J. (2020).
A flow-through microfluidic relative permittivity sensor.
Micromachines,
11(3), Article 325.
https://doi.org/10.3390/mi11030325
Lötters, J. C.
, Groenesteijn, J.
, Steenwelle, R. J. A.
, Wiegerink, R. J.
, Alveringh, D.
, Ma, K.
, & Zeng, Y. (2019).
Coriolis flow sensor. (Patent No.
WO2019143239A8).
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Universiteit Twente
Faculty of Science and Technology
Carré
(gebouwnr. 15), kamer C4613
Hallenweg 21
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Science and Technology
Carré
C4613
Postbus 217
7500 AE Enschede