Expertises
Physics & Astronomy
# Actuation
# Mass Flow
# Piezoelectric Transducers
# Sensors
# Silicon Nitrides
Earth & Environmental Sciences
# Fuel Gas
Engineering & Materials Science
# Gas Fuels
# Lead Zirconate Titanate
Verbonden aan
Publicaties
Recent
Zeng, Y. (2022).
Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. University of Twente.
https://doi.org/10.3990/1.9789036553636
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators.
Journal of microelectromechanical systems,
30(6), 885-896.
https://doi.org/10.1109/JMEMS.2021.3107744
Zeng, Y.
, Sanders, R.
, Wiegerink, R.
, & Lötters, J. (2020).
A flow-through microfluidic relative permittivity sensor.
Micromachines,
11(3), [325].
https://doi.org/10.3390/mi11030325
Lötters, J. C.
, Groenesteijn, J.
, Steenwelle, R. J. A.
, Wiegerink, R. J.
, Alveringh, D.
, Ma, K.
, & Zeng, Y. (2019).
Coriolis flow sensor. (Patent No.
WO2019143239A8).
Zhao, Y.
, Veltkamp, H-W.
, de Boer, M. J.
, Zeng, Y.
, Groenesteijn, J.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In
Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10).
Zhao, Y.
, Veltkamp, H-W.
, Zeng, Y.
, Lötters, J. C.
, & Wiegerink, R. J. (2018).
Micro machined fuel gas combustion unit. (Patent No.
WO2019054872A1).
https://patents.google.com/patent/WO2019054872A1/en
Zhao, Y.
, Veltkamp, H-W.
, Zeng, Y.
, Lötters, J. C.
, & Wiegerink, R. J. (2018).
Method of fabricating a micro machined channel. (Patent No.
WO2019054873A1).
https://patents.google.com/patent/WO2019054873A1/en
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Steenwelle, R. J. A.
, Ma, K.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2017).
Micro Coriolis mass flow sensor driven by external piezo ceramic. 45-48. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.
Zhao, Y.
, Veltkamp, H-W.
, de Boer, M. J.
, Zeng, Y.
, Groenesteijn, J.
, Wiegerink, R. J.
, & Lötters, J. C. (2017).
Fabrication process for a large volume silicon nitride micro-combustor. 450. Abstract from 43rd International Conference on Micro and Nanoengineering, Braga, Portugal.
Pure Link
Contactgegevens
+31534894373
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Bezoekadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(gebouwnr. 15), kamer C1540
Hallenweg 23
7522NH Enschede
Postadres
Universiteit Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C1540
Postbus 217
7500 AE Enschede