Expertises
Physics & Astronomy
# Actuation
# Mass Flow
# Piezoelectric Transducers
# Sensors
# Silicon Nitrides
Earth & Environmental Sciences
# Fuel Gas
Engineering & Materials Science
# Gas Fuels
# Lead Zirconate Titanate
Publicaties
Recent
Zeng, Y. (2022).
Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036553636
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators.
Journal of microelectromechanical systems,
30(6), 885-896.
https://doi.org/10.1109/JMEMS.2021.3107744
Zeng, Y.
, Sanders, R.
, Wiegerink, R.
, & Lötters, J. (2020).
A flow-through microfluidic relative permittivity sensor.
Micromachines,
11(3), [325].
https://doi.org/10.3390/mi11030325
Lötters, J. C.
, Groenesteijn, J.
, Steenwelle, R. J. A.
, Wiegerink, R. J.
, Alveringh, D.
, Ma, K.
, & Zeng, Y. (2019).
Coriolis flow sensor. (Patent No.
WO2019143239A8).
Zhao, Y.
, Veltkamp, H-W.
, de Boer, M. J.
, Zeng, Y.
, Groenesteijn, J.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In
Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10). University of Twente.
Zhao, Y.
, Veltkamp, H-W.
, Zeng, Y.
, Lötters, J. C.
, & Wiegerink, R. J. (2018).
Micro machined fuel gas combustion unit. (Patent No.
WO2019054872A1).
https://patents.google.com/patent/WO2019054872A1/en
Zhao, Y.
, Veltkamp, H-W.
, Zeng, Y.
, Lötters, J. C.
, & Wiegerink, R. J. (2018).
Method of fabricating a micro machined channel. (Patent No.
WO2019054873A1).
https://patents.google.com/patent/WO2019054873A1/en
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Steenwelle, R. J. A.
, Ma, K.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.
Contactgegevens
+31534894373
(bij geen gehoor)
Bezoekadres
Universiteit Twente
Drienerlolaan 5
7522 NB Enschede
Postadres
Universiteit Twente
Postbus 217
7500 AE Enschede